Ionizing Pump Stage for Vacuum Systems
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Solution Overview
Problem
Conventional vacuum pumps, particularly turbomolecular pumps, have limited suction capacity and Ho factor for light gases, and are complex and costly to manufacture, with high maintenance and wear issues.
Innovation Solution
An ionizing pump stage with an inlet, ionizing section, acceleration device, and neutralizing section that ionizes, accelerates, and electrically neutralizes gas molecules, creating a 'molecular diode' effect for efficient pumping, independent of gas molecular mass, with a simple design and no moving parts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If turbomolecular pumps are used to achieve high vacuum pressures, then the vacuum pressure can be reduced to very low levels, but the suction capacity and Ho factor are restricted and decrease for light gases
Solution Approach 1:
The patent replaces the mechanical moving parts of turbomolecular pumps with an ionizing field-based pumping mechanism. Gas molecules are ionized, accelerated by electric fields, and collected on electrodes, eliminating the need for high-speed rotating components while achieving superior suction capacity independent of molecular mass
Solution Approach 2:
The patent changes the fundamental operating parameter from mechanical rotation to electrical field acceleration. By controlling voltage, current, and ionization conditions, the pump achieves adaptable performance across different gas types and pressure ranges, with suction capacity no longer dependent on molecular mass
2Productivity
If vacuum pumps with high suction capacity are designed, then the pump power increases, but the design becomes complex and manufacturing becomes complicated and expensive
Solution Approach 1:
The pump is divided into distinct functional sections: ionizing section with cathodes, acceleration section with grids, and collection section with anodes. Each section can be independently optimized and manufactured, simplifying production while achieving high overall suction capacity through the coordinated action of multiple segments
Solution Approach 2:
The ionizing pump stage serves multiple functions: ionization of gas molecules, acceleration of ions, electrical isolation of vacuum chambers, and gas collection. This multi-functionality is achieved within a single integrated design, reducing the need for multiple separate components and simplifying manufacturing
3Reliability
If turbomolecular pumps are used, then vacuum pressure can be maintained, but the pumps have high wear and require frequent maintenance
Solution Approach 1:
The patent eliminates mechanical moving parts by replacing the rotating turbine mechanism with an electrostatic field-based ion transport system. Gas molecules are ionized and transported through electric fields without mechanical contact, eliminating wear, friction, and the need for maintenance
Solution Approach 2:
The pump design allows the ionized gas molecules to self-accelerate through the electric field without mechanical assistance. The system uses the inherent properties of ionized particles and electric fields to achieve pumping action, requiring no mechanical drive systems or moving components that would wear
4Quantity of substance
If turbomolecular pumps are used for light gases, then pumping action is reduced, but increasing pump complexity does not resolve this fundamental limitation
Solution Approach 1:
The patent changes the fundamental interaction mechanism from mechanical momentum transfer to electrical field acceleration. Since the acceleration force on ions is proportional to charge and electric field strength rather than molecular mass, the suction capacity becomes independent of gas type, achieving equal performance for light and heavy gases
Solution Approach 2:
The patent replaces the mass-dependent mechanical collision mechanism of turbomolecular pumps with a charge-based electrical acceleration mechanism. This substitution fundamentally removes the molecular mass dependency, allowing uniform pumping performance across all gas types without increasing complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Achieves high suction capacity, high Ho factor, and low maintenance with improved vacuum quality, suitable for use upstream of other pump stages or as a booster, with adaptable performance and reduced contamination risks.
Implementation Method 1
an ionizing device for ionizing the gas entered into the ionizing section
Implementation Method 2
an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction of the gas
Implementation Method 3
a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section
Implementation Method 4
The electrically neutral gas molecules only diffuse back in the direction of the ionizing section with a low probability predefined by the thermal movement of the gas molecules
Data Source
AI summary
The invention relates to an ionizing pump stage, in particular for a vacuum pump, comprising an inlet for gas entering into the pump stage; an ionizing section communicating with the inlet in a gas-conductive manner and an ionizing device for ionizing the gas entered into the ionizing section; an acceleration device for accelerating the ionized gas present in the ionizing section in the conveying direction; and a neutralizing section following the ionizing section in the conveying direction and communicating with the ionizing section in a gas-conductive manner and a neutralizing device for the electrical neutralizing of the ionized gas entering into the neutralizing section.