IPA Supply and Return Filtration for Cleaner Substrate Processing
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Solution Overview
Problem
Existing liquid processing apparatuses face challenges in maintaining the cleanness of processing liquids, particularly IPA, due to the presence of foreign substances, which can affect the quality of substrate processing in semiconductor wafer handling systems.
Innovation Solution
A liquid processing apparatus with a storage tank, circulation line, supply line, and return line, equipped with filters in strategic locations to remove foreign substances from the IPA, ensuring its high cleanness before and during use in substrate processing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a filter is installed in the circulation line to remove foreign substances, then the cleanness of processing liquid is improved, but the device complexity increases
Solution Approach 1:
The circulation line is divided into multiple segments with filters installed at specific locations (upstream and downstream of the supply line connection). This segmentation allows targeted filtration without requiring a single complex filtration system, resolving the contradiction by improving cleanness through distributed filtering while keeping individual filter units simple.
Solution Approach 2:
The filter acts as an intermediary component between the circulation line and the supply line, intercepting foreign substances before they reach the substrate processing area. This mediator approach improves processing liquid cleanness without requiring direct modification of the substrate processing equipment, thereby limiting the increase in overall device complexity.
2Reliability
If multiple filters are installed in the supply line and return line, then the cleanness of processing liquid is improved, but the loss of time for liquid circulation increases
Solution Approach 1:
Filters are strategically positioned at specific locations where foreign substances are most likely to enter the supply line (upstream of the connection point) and in the return line. This local quality approach ensures effective filtration at critical points without requiring filters throughout the entire circulation path, thus improving cleanness while minimizing circulation time loss.
Solution Approach 2:
A filter is installed upstream of the supply line connection point to remove foreign substances before the liquid enters the supply line. This preliminary action prevents contamination from reaching the substrate processing area, improving cleanness efficiency while reducing the need for additional downstream filtration that would increase circulation time.
3Productivity
If the circulation line is used to return processing liquid back into the storage tank, then the productivity is improved, but foreign substances may contaminate the processing liquid
Solution Approach 1:
Foreign substances are extracted from the circulation line through filters installed in both the supply line and return line. The filter in the return line specifically removes contaminants before the liquid re-enters the storage tank, preventing contamination accumulation. This extraction approach maintains the productive circulation system while ensuring continuous cleanness of the processing liquid.
Solution Approach 2:
The circulation system operates continuously with filters actively removing foreign substances throughout the circulation cycle. This continuous filtration action ensures that the processing liquid maintains its cleanness throughout repeated circulation cycles, enabling sustained high productivity without degradation of liquid quality over time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively removes foreign substances from IPA, enhancing its cleanness and stability, thereby improving the quality of substrate processing and reducing initial operation time by ensuring a high degree of purity and temperature control.
Implementation Method 1
The filter is provided in at least one of the supply line on an upstream side of a connection point between the return line and the supply line or the return line, and is configured to remove a foreign substance in the processing liquid
Data Source
AI summary
A liquid processing apparatus includes a storage tank, a circulation line, a supply line, a return line and at least one filter. The storage tank stores a processing liquid therein. Through the circulation line, the processing liquid sent from the storage tank is returned back into the storage tank. The supply line connects the circulation line and a supply configured to supply the processing liquid onto a substrate. The return line is connected to the supply line, and the processing liquid is returned back into the storage tank from the supply line through the return line. The filter is provided in at least one of the supply line on an upstream side of a connection point between the return line and the supply line or the return line, and is configured to remove a foreign substance in the processing liquid.