Integrated Passive Devices in Substrate Layers

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Solution Overview

Problem

Current integrated passive device (IPD) technologies face challenges in reducing footprint and costs while simplifying fabrication processes, and achieving effective coupling and directionality in RF components for portable wireless devices.

Innovation Solution

A novel substrate with integrated passive devices is developed, where passive device patterns are formed directly in under bump metal (UBM) layers, intermediate dielectric layers, or redistribution layers, without the need for an additional Si interposer, allowing concurrent formation during patterning or via filling processes, thereby reducing steps and costs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If passive devices are formed in separate layers or with additional Si interposer, then device functionality is achieved, but product size and fabrication complexity increase

Engineering Contradiction:
Improveproduct sizeVSAvoidfabrication process complexity
Core Design Contradiction:
Area of moving objectVSDevice complexity

Solution Approach 1:

The patent merges the formation of passive devices with existing structural layers (UBM layers, dielectric layers, redistribution layers) by forming passive device patterns concurrently during the patterning or via filling processes of these layers. This integration eliminates the need for separate passive device fabrication steps and additional Si interposers, thereby reducing both product size and fabrication complexity while maintaining full device functionality

Inventive Principle:
Principle #5Merging (Combining)

2Area of stationary object

If discrete passive devices are used, then device functionality is achieved, but circuit board area and assembly costs increase

Engineering Contradiction:
Improvecircuit board areaVSAvoidassembly costs
Core Design Contradiction:
Area of stationary objectVSEase of manufacture

Solution Approach 1:

The patent integrates passive devices directly into the substrate structure by forming passive device patterns within existing layers during standard fabrication processes. This eliminates the need for separate discrete passive components and their associated assembly operations, thereby reducing circuit board area and assembly costs while maintaining full functionality

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The substrate structure serves multiple functions simultaneously: it provides mechanical support, electrical interconnection through redistribution layers, and passive device functionality all in one integrated platform. This multi-functionality eliminates the need for separate discrete components and reduces overall system complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS9035457B2Substrate with integrated passive devices and method of manufacturing the same
Publication Date: 2015.05.19 UNITED MICROELECTRONICS CORP
  • US9035457B2 patent drawing
  • US9035457B2 patent drawing
  • US9035457B2 patent drawing

AI summary

A substrate with integrated passive devices and method of manufacturing the same are presented. The substrate may include through silicon vias, at least one redistribution layer having a 1st passive device pattern and stacked vias, and an under bump metal layer having a 2nd passive device pattern.