IR Sensor With Nanostructured Absorber and Thin Resonant Cavity
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing infrared ray sensors face manufacturing challenges due to the difficulty in forming thin film processes on thick sacrificial layers, particularly in creating a resonant cavity with a thickness of ¼ of the wavelength, which affects the uniformity and yield of the sensing layer and absorption layer.
Innovation Solution
The infrared ray sensor employs a nanostructure in the absorption layer with a resonant cavity height less than ¼ of the wavelength, utilizing a nano-disk or nano-ring configuration, which simplifies the manufacturing process and improves yield.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If the resonant cavity thickness is set to 1/4 of the wavelength, then the light absorption efficiency is improved, but the manufacturing complexity and difficulty increase due to the need for thick sacrificial layers
Solution Approach 1:
The patent changes the resonant cavity thickness parameter from the conventional 1/4 wavelength to a reduced thickness of 0.5-2.0 μm. This parameter change allows the cavity to maintain effective light absorption functionality while avoiding the manufacturing difficulties associated with thick sacrificial layers, thus resolving the contradiction between absorption efficiency and manufacturing ease
Solution Approach 2:
The patent employs a sacrificial layer that is removed after serving its temporary purpose of defining the cavity space. By using a removable sacrificial layer approach and reducing the required thickness, the manufacturing process becomes simpler and more cost-effective while still achieving the necessary cavity functionality for light absorption
2Loss of energy
If the resonant cavity thickness is set to 1/4 of the wavelength, then the light absorption efficiency is improved, but the manufacturing precision requirements increase for forming thin films on thick sacrificial layers
Solution Approach 1:
By changing the cavity thickness parameter to a reduced range of 0.5-2.0 μm, the patent eliminates the need for forming thin films on excessively thick sacrificial layers. This parameter modification directly reduces the manufacturing precision requirements while preserving the light absorption efficiency through optimized nanostructure design
Solution Approach 2:
The patent introduces a carefully controlled sacrificial layer as an intermediary element that defines the cavity space during manufacturing. By optimizing the sacrificial layer thickness to match the reduced cavity requirements, the process mediates between the need for sufficient cavity volume for light absorption and the need for manageable thin film deposition precision
3Ease of manufacture
If the resonant cavity thickness is reduced to less than 1/4 of the wavelength, then the manufacturing process is simplified, but the light absorption efficiency may be compromised
Solution Approach 1:
The patent optimizes the resonant cavity thickness parameter to a specific reduced range of 0.5-2.0 μm, which is less than 1/4 wavelength but carefully selected to maintain adequate light absorption. This parameter optimization resolves the contradiction by finding the optimal balance point where manufacturing is simplified yet absorption efficiency is preserved
Solution Approach 2:
The patent employs composite structures including metal nanoparticles, dielectric layers, and absorptive materials within the reduced-thickness cavity. These composite materials enhance the light absorption efficiency within the constrained cavity volume, allowing the system to achieve high absorption despite the reduced thickness that simplifies manufacturing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design achieves high light energy absorption rates while reducing process complexity and cost, maintaining efficient temperature sensing performance.
Implementation Method 1
an absorption layer including a nanostructure and configured to absorb light energy
Implementation Method 2
a reflective layer on an upper surface of the substrate... a resonant cavity between the composite layer and the reflective layer
Implementation Method 3
a sensing layer including a plurality of temperature sensing cells... measures a temperature of an object by absorbing radiant energy in an infrared ray band emitted from the object, converting it into thermal energy, and electrically measuring a change in resistance according to a value of thermal energy
Data Source
AI summary
An infrared sensor includes a substrate, a reflective layer on an upper surface of the substrate, and a composite layer including an absorption layer including a nanostructure and configured to absorb light energy and a sensing layer including a plurality of temperature sensing cells, where the composite layer is above the upper surface of the substrate, and where the infrared ray sensor further includes a resonant cavity between the composite layer and the reflective layer.