IR Temperature Sensing for Precise Substrate Dispensing
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Solution Overview
Problem
Existing dispensing systems lack precise temperature monitoring of electronic substrates and material deposition, leading to inefficient waiting times and potential temperature inconsistencies.
Innovation Solution
Implementing a non-contact infrared sensor mounted on an adjustable mechanism to measure the temperature of specific locations on electronic substrates, allowing for precise temperature control and optimization of sensing spot sizes through X, Y, and Z-axis movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional contact temperature sensors are used to monitor substrate temperature, then temperature measurement can be achieved, but the measurement process interferes with the substrate and extends processing time
Solution Approach 1:
The patent replaces contact-based mechanical temperature sensors with a non-contact infrared temperature sensor that measures substrate temperature remotely through optical radiation detection, eliminating the need for physical contact and associated processing delays
Solution Approach 2:
The patent introduces infrared radiation as an intermediary medium to transfer temperature information from the substrate to the sensor without direct contact, allowing temperature measurement while the substrate remains in its processing position
2Manufacturing precision
If temperature monitoring is implemented to ensure proper substrate temperature, then deposition quality improves, but system complexity increases
Solution Approach 1:
The patent uses infrared radiation as an intermediary to enable non-contact temperature measurement, adding monitoring capability without requiring physical modification of the substrate or complex integration of contact sensors into the deposition system
Solution Approach 2:
The patent replaces complex contact sensor integration requirements with a simpler optical measurement system that can be positioned remotely, reducing mechanical complexity while maintaining temperature control for deposition quality
3Measurement precision
If non-contact infrared sensor is positioned close to the substrate for accurate measurement, then temperature sensing precision improves, but the risk of contamination or damage to the substrate increases
Solution Approach 1:
The patent uses optical/infrared detection instead of mechanical contact to measure substrate temperature, allowing the sensor to be positioned close to the substrate for high measurement precision while maintaining a contamination-free environment through the vacuum-compatible optical measurement process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Ensures accurate temperature measurement and control of both the material and substrate, optimizing process efficiency and reducing unnecessary waiting times by ensuring all components are at the desired temperature before deposition.
Implementation Method 1
The non-contact sensor may be an infrared temperature sensor
Data Source
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AI summary
A dispensing system (10) includes an optional pre-heat station configured to receive an electronic substrate (22), a dispense station (14, 18) configured to dispense material on the electronic substrate received from the optional pre-heat station, an optional post-heat station configured to receive the electronic substrate from the dispense station, and a non-contact sensor (212) positioned above the electronic substrate on at least one of the optional pre-heat station, the dispense station, and the optional post-heat station.