Isolated Zener Diode Scalable Breakdown Voltage

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Solution Overview

Problem

Zener diodes require additional costly and time-consuming masking and doping processes to achieve a relatively low reverse-bias breakdown voltage, which is not efficiently addressed by existing technologies.

Innovation Solution

An isolated Zener diode structure with a scalable reverse-bias breakdown voltage is achieved by positioning cathode and anode contact regions relative to each other and an isolation region, allowing the length of the cathode contact region to be adjusted to control the breakdown voltage, and optionally incorporating a conductive field plate to ensure the desired voltage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If additional masking and doping processes are used to achieve low reverse-bias breakdown voltage, then the reverse-bias breakdown voltage is reduced, but manufacturing complexity and cost increase

Engineering Contradiction:
Improvereverse-bias breakdown voltageVSAvoidmasking and doping processes
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent changes the geometric parameter of the cathode contact region (its lateral extension length into the anode well region) to control the reverse-bias breakdown voltage. By adjusting this length, different breakdown voltages are achieved without adding process steps, directly resolving the contradiction between achieving precise voltage control and maintaining manufacturing simplicity

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent transitions from controlling breakdown voltage through vertical doping profiles to controlling it through lateral dimension adjustment of the cathode contact region. This dimensional shift allows voltage control via geometric configuration rather than additional doping processes, reducing manufacturing complexity while maintaining voltage precision

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If additional masking and doping processes are used to achieve low reverse-bias breakdown voltage, then the reverse-bias breakdown voltage is reduced, but processing time increases

Engineering Contradiction:
Improvereverse-bias breakdown voltageVSAvoidprocessing time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent uses geometric parameter adjustment (lateral extension length of cathode contact) to control breakdown voltage, eliminating the need for additional time-consuming doping processes. This approach achieves precise voltage control while significantly reducing total processing time

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The cathode contact region geometry is designed from the outset to provide the desired breakdown voltage characteristics. By pre-configuring the lateral extension length during initial fabrication, the need for subsequent voltage-adjustment doping steps is eliminated, reducing overall processing time

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If additional masking and doping processes are used to achieve low reverse-bias breakdown voltage, then the reverse-bias breakdown voltage is reduced, but manufacturing cost increases

Engineering Contradiction:
Improvereverse-bias breakdown voltageVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent achieves precise breakdown voltage control through geometric parameter adjustment of the cathode contact region rather than additional doping processes. This reduces manufacturing cost by eliminating expensive masking and doping steps while maintaining the ability to precisely control voltage characteristics

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses a standardized diode structure where breakdown voltage is controlled by copying the same geometric configuration with varying lateral extension lengths. This allows precise voltage control through design replication rather than complex process replication, reducing manufacturing cost

Inventive Principle:
Principle #26Copying

4Manufacturing precision

If the cathode contact region extends laterally into the anode well region, then the reverse-bias breakdown voltage is reduced, but device structure complexity increases

Engineering Contradiction:
Improvereverse-bias breakdown voltageVSAvoidcontact region structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent reduces breakdown voltage by changing the lateral extension parameter of the cathode contact region into the anode well. This creates a controlled overlap geometry that modifies the electric field distribution, achieving voltage control through a single geometric parameter change rather than complex multi-region structures

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for the selective adjustment of reverse-bias breakdown voltage without additional masking and doping processes, reducing costs and processing time while maintaining the desired voltage levels.

Implementation Method 1

one end of the cathode contact region can extend laterally into the anode well region. The length of this end can be selectively adjusted in order to selectively adjust the reverse-bias breakdown voltage (Vb) of the Zener diode

Methodology Applied
Scientific EffectField effect: Electric Field

Data Source

PatentUS8492866B1Isolated Zener diode
Publication Date: 2013.07.23 GLOBALFOUNDRIES US INC
  • US8492866B1 patent drawing
  • US8492866B1 patent drawing
  • US8492866B1 patent drawing

AI summary

Disclosed is a Zener diode having a scalable reverse-bias breakdown voltage (Vb) as a function of the position of a cathode contact region relative to the interface between adjacent cathode and anode well regions. Specifically, cathode and anode contact regions are positioned adjacent to corresponding cathode and anode well regions and are further separated by an isolation region. However, while the anode contact region is contained entirely within the anode well region, one end of the cathode contact region extends laterally into the anode well region. The length of this end can be predetermined in order to selectively adjust the Vb of the diode (e.g., increasing the length reduces Vb of the diode and vice versa). Also disclosed are an integrated circuit, incorporating multiple instances of the diode with different reverse-bias breakdown voltages, a method of forming the diode and a design structure for the diode.