Isolation Valve Layout That Eliminates Gas Dead Volume
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Solution Overview
Problem
Current gas flow path configurations in semiconductor manufacturing have dead volumes that lead to process gas backflow, causing equipment damage, clogging, and undesired reactions, resulting in significant downtime and loss of throughput.
Innovation Solution
A gas distribution apparatus with a valve design featuring two inlet lines where the downstream end of one line connects with the first inlet line, and a sealing surface separates them to prevent fluid communication, eliminating dead volume and allowing alternate clean and process gas delivery without the need for purging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional gas flow path configurations with dead volumes are used, then gas distribution is simplified, but process gas backflow occurs causing equipment damage, clogging, and undesired reactions
Solution Approach 1:
The valve body is segmented into multiple inlet lines (first inlet line, second inlet line) with distinct flow paths that meet at a common downstream end. This segmentation allows each inlet line to be independently controlled while preventing cross-contamination and backflow between different gas sources, eliminating the need for large dead volumes for purging.
2Productivity
If dead volume is present in gas flow paths, then valve design is simpler, but purge steps are required to prevent gas phase reactions and equipment damage
Solution Approach 1:
The invention extracts and eliminates the dead volume problem by designing inlet lines where the downstream end of one line connects with the first inlet line along its length, rather than creating separate branches that would trap residual gas. This extraction of the dead volume concept allows gas flow paths to be cleared without extensive purging, maintaining high productivity while reducing operational complexity.
3Productivity
If reactive gases are used in gas lines, then process efficiency is improved, but gas phase reactions in dead volumes can damage equipment and cause clogging
Solution Approach 1:
The valve design implements preliminary anti-action by preventing the formation of harmful gas phase reactions before they can occur. The inlet line configuration where the downstream end connects along the length of the first inlet line ensures that reactive gases do not stagnate in dead volumes, eliminating the conditions necessary for unwanted chemical reactions that would damage equipment or cause clogging.
4Reliability
If residue from gas phase reactions accumulates in process lines, then maintenance requirements increase, but reaction products can damage equipment and create undesired products
Solution Approach 1:
The invention applies preliminary action by preventing residue accumulation before it becomes a problem. The inlet line design where the downstream end of one line connects with the first inlet line along its length prevents gas phase reactions from occurring in the first place, eliminating residue formation. This preliminary prevention maintains equipment reliability without requiring time-consuming maintenance interventions.
Data Source
AI summary
Gas distribution apparatus, processing chambers and methods using a dead volume-free valve are described. The valve has a first inlet line with upstream and downstream ends and a second inlet line with a downstream end that connects to the first inlet line. A sealing surface at the downstream end of the second inlet line separates the first inlet line from the second inlet line preventing fluid communication between the first inlet line and the second inlet line.