Iterative OPC Repair Flow for Layout Print Error Correction
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Solution Overview
Problem
Existing resolution enhancement techniques, such as optical proximity correction (OPC), are computationally intensive and time-consuming, often requiring manual correction and repeated processes to address potential print errors in layout design data, which can lead to defects during lithographic manufacturing due to non-converged edges, mask rule constraints, and design intent failures.
Innovation Solution
An iterative OPC repair flow is implemented, where regions with potential print errors are identified and selectively modified using different sets of parameter values in each iteration, with a stitching module to align edge fragments and prevent 'jog' issues, reducing the need for manual correction and repeated OPC processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If optical proximity correction (OPC) is applied to layout design data, then manufacturing precision is improved, but device complexity and processing time increase
Solution Approach 1:
The patent segments the layout design data into multiple layers and processes each layer separately through iterative OPC applications. This divides the complex computational task into manageable segments, reducing overall device complexity while maintaining manufacturing precision through focused correction of each layer's specific errors
Solution Approach 2:
The patent implements dynamic parameter adjustment where OPC parameters are modified across multiple iterations based on detected print errors. The system adaptively changes correction strategies from initial broad corrections to targeted refinements, optimizing the balance between manufacturing precision and computational efficiency
2Manufacturing precision
If manual correction is performed to fix potential print errors, then manufacturing precision is improved, but productivity decreases
Solution Approach 1:
The patent implements an automated iterative correction system that detects and corrects its own errors without manual intervention. The system automatically identifies print errors, applies appropriate corrections, and iterates until convergence, eliminating the need for manual correction while maintaining high manufacturing precision and preserving productivity
Solution Approach 2:
The patent incorporates feedback mechanisms where each iteration's results are evaluated and used to guide subsequent corrections. The system continuously monitors for remaining print errors and adjusts its correction strategy accordingly, achieving high manufacturing precision through automated feedback-driven improvement rather than manual intervention
3Manufacturing precision
If repeated OPC processes are applied to correct remaining errors, then manufacturing precision is improved, but loss of time increases
Solution Approach 1:
The patent applies partial OPC actions in each iteration, focusing only on the specific regions and error types detected in the previous iteration. Rather than re-processing the entire layout, the system applies corrections only where needed, achieving complete error correction through targeted partial actions that minimize time loss
Solution Approach 2:
The patent performs preliminary error detection and classification before applying corrections in each iteration. By identifying and categorizing remaining print errors in advance, the system can prepare and apply targeted corrections efficiently, reducing the time required for each subsequent OPC pass while maintaining complete error correction
Data Source
AI summary
After layout design data has been modified using an OPC process, a repair flow is initiated. This repair flow includes analyzing the modified data to identify any remaining or new potential print errors in the layout data. Regions then are formed around the identified potential print errors, and a subsequent OPC process is performed only on the data within these regions using a different set of process parameters from the process parameters employed by the initial OPC process. This repair flow is iteratively repeated, where a different set of process parameter values for the subsequent OPC process is used during each iteration.