ITO Film Patterning via Mechanical Bending on Flexible Substrates

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Solution Overview

Problem

The challenge lies in developing a cost-effective method for patterning electrically-conductive films like indium-tin-oxide (ITO) on flexible substrates, which are compatible with continuous roll-to-roll manufacturing and provide precise, durable electrodes without requiring costly or environmentally-unfriendly materials and solvents, while addressing the brittleness of ITO and the reduced conductivity of alternative polymers.

Innovation Solution

The method involves bending a flexible substrate with an ITO film to create dielectric crack lines, which isolate conductive sections, using mechanical or thermal stress to pattern the film, and optionally employing adhesive films to enhance electrical isolation and remove residual particles, allowing for the formation of precise and durable electrodes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional photolithographic techniques are used to pattern ITO films on flexible substrates, then precise electrode definition is achieved, but manufacturing cost increases and environmental harm occurs due to costly materials and solvents

Engineering Contradiction:
Improveelectrode definition precisionVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The invention extracts and removes the harmful and costly photolithographic processing steps (materials and solvents) while retaining the essential function of patterning ITO films. The mechanical bending method directly creates dielectric lines without requiring chemical etchants, photoresists, or development solvents, thereby eliminating manufacturing costs associated with these materials and their environmental harm.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention replaces the chemical-based photolithographic system with a mechanical bending system. By applying controlled mechanical stress through bending the flexible substrate, dielectric lines are formed in the ITO film through mechanical cracking, substituting chemical processes with mechanical processes to achieve patterning.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Ease of manufacture

If ITO film is deposited on flexible substrates for cost reduction, then material cost decreases, but the film cracks when bent leading to reduced reliability

Engineering Contradiction:
Improvematerial costVSAvoidfilm durability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The invention performs preliminary patterning action by mechanically bending the substrate during or after ITO deposition to create dielectric lines before the device is fully assembled. This preliminary mechanical action patterns the ITO film into electrically isolated conductive sections, preventing subsequent cracking issues by establishing the electrode pattern structure in advance.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention converts the harmful brittleness and cracking tendency of ITO film into a beneficial feature. By applying controlled mechanical bending, the intentional cracking creates well-defined dielectric lines that electrically isolate conductive sections, transforming the material's weakness into a useful patterning mechanism.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

3Ease of manufacture

If mechanical bending is applied to pattern ITO films, then manufacturing cost decreases and process simplicity increases, but control over crack line precision becomes challenging

Engineering Contradiction:
Improveprocess simplicityVSAvoidcrack line definition
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The invention controls crack line precision by changing key parameters of the mechanical bending process, including the radius of curvature, bending speed, number of bending cycles, and substrate pre-treatment conditions. By optimizing these parameters, well-defined dielectric lines with consistent spacing and width are achieved, ensuring manufacturing precision despite the simplicity of the mechanical process.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively patterns ITO films into conductive electrodes with improved electrical isolation and reduced production costs, utilizing flexible substrates and environmentally friendly processes, enhancing the durability and conductivity of the electrodes.

Implementation Method 1

bending the combined layer about a radius of curvature to crack the electrically conductive film to form a plurality of dielectric lines

Methodology Applied
Scientific EffectMechanical stress-induced cracking: Fracture Mechanics

Implementation Method 2

providing an adhesive film on the electrically conductive film before bending the combined layer; the adhesive film capturing residual particles

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS10828797B2Method of patterning electrically-conductive film on a flexible substrate
Publication Date: 2020.11.10 KENT STATE UNIV
  • US10828797B2 patent drawing
  • US10828797B2 patent drawing
  • US10828797B2 patent drawing

AI summary

A method of patterning a combined layer of an electrically-conductive film, such as indium-tin-oxide (ITO), that is disposed on a flexible substrate includes bending the combined layer about a radius of curvature. The combined layer is initially bent in a first direction so that the electrically-conducive film is distal to the radius of curvature, so as to form initial dielectric lines in the electrically-conductive film. The combined layer is then bent in another direction so that the electrically-conductive film is proximate to the radius of curvature to further enhance the dielectric performance of the initial dielectric lines. The dielectric lines electrically isolate a portion of the electrically-conductive film that is disposed therebetween, to form an electrically conductive electrode.