ITO Ceramic Target Grain Size Control via Integrated Sintering
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Solution Overview
Problem
Current methods for preparing ITO ceramic targets often result in targets with either incomplete densification at lower sintering temperatures or coarse grains and poor uniformity at higher temperatures, leading to suboptimal performance and production efficiency.
Innovation Solution
A method involving the ball-milling of In2O3 and SnO2 powders with deionized water, diluent, binder, and polymer material to create a slurry with controlled particle size, followed by pressure grouting and integrated degreasing and sintering treatments at specific temperature ranges to achieve a ceramic target with controllable grain size and high density.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the maximum sintering temperature is lower than 1,540°C, then energy consumption is reduced and equipment wear is minimized, but the ITO ceramic target cannot be fully densified and internal holes remain
Solution Approach 1:
The patent applies preliminary action by performing ball-milling of the powder mixture before sintering to achieve fine and uniform particle distribution (D50: 200-300 nm). This pre-treatment creates a well-densified green body structure that enables full densification at lower sintering temperatures (1,540-1,600°C), resolving the contradiction between temperature reduction and densification quality.
Solution Approach 2:
The patent changes multiple parameters simultaneously: powder particle size (D50: 200-300 nm), slurry solid content (70-80%), and sintering temperature (1,540-1,600°C). These coordinated parameter changes enable achieving full densification at lower temperatures, resolving the technical contradiction between energy consumption and densification quality.
2Manufacturing precision
If the maximum sintering temperature is higher than 1,600°C, then densification is improved, but coarse grains and poor uniformity occur
Solution Approach 1:
The patent performs preliminary ball-milling to achieve uniform particle size distribution (D50: 200-300 nm) before sintering. This pre-treatment ensures uniform nucleation sites during sintering, preventing coarse grain formation even at high temperatures and maintaining grain uniformity while achieving full densification.
Solution Approach 2:
The patent optimizes the sintering temperature range (1,540-1,600°C) and holds it for a specific duration (12-36 hours). This controlled parameter change prevents excessive grain growth that would occur at higher temperatures, maintaining both densification and grain uniformity.
3Device complexity
If separate degreasing and sintering processes are used, then process control is simplified, but production time is extended and energy consumption increases
Solution Approach 1:
The patent merges the degreasing and sintering processes into a single integrated firing step. The green body is directly heated to sintering temperature (1,540-1,600°C) and held for 12-36 hours, eliminating the separate degreasing step. This reduces production time and energy consumption while maintaining product quality through the previously optimized powder preparation and green body formation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method produces ITO ceramic targets with high relative density, low resistivity, and uniform grain size, enhancing the quality and efficiency of ITO film production while reducing production costs and extending equipment lifespan.
Implementation Method 1
In2O3 powder with mass fraction of 90～97 and SnO2 powder with mass fraction of 10～3 are ball-milled and mixed with deionized water, diluent, binder and polymer material by a sand mill
Implementation Method 2
ITO ceramic slurry is shaped by pressure grouting to obtain an ITO ceramic green body with a relative density of 58～62%
Implementation Method 3
Heating the degreasing and sintering integrated furnace to a degreasing temperature of 700～800° C., and degreasing the ITO ceramic target in an atmospheric oxygen atmosphere for a degreasing time set to 12 to 36 hours
Implementation Method 4
sintering the ITO target at the second sintering temperature in the atmospheric oxygen atmosphere with temperature kept for 12 to 36 hours
Data Source
AI summary
A method of preparing an ITO ceramic target includes that: In2O3 powder with mass fraction of 90˜97 and SnO2 powder with mass fraction of 10˜3 are ball-milled and mixed with deionized water, diluent, binder and polymer material by a sand mill to obtain an ITO ceramic slurry with a solid content between 70˜80% and a viscosity between 120˜300 mpa·s, with an average particle size D50 of the mixed powder controlled at 100˜300 nm; the ITO ceramic slurry is shaped by a pressure grouting to obtain an ITO ceramic green body with a relative density of 58˜62%; the ITO ceramic green body is put into a degreasing and sintering integrated furnace, and under a degreasing temperature of 700˜800° C., the ITO ceramic target is degreased in an atmospheric oxygen atmosphere for the time set to 12˜36 hours; the temperature increases from the degreasing temperature to the first sintering temperature of 1,600˜1,650° C.