Two-Phase Jet Impingement Testing With Saturation Pressure Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current two-phase jet impingement cooling systems for semiconductor testing face limitations such as the need for air injection, which reduces system pressure and efficiency, and require separate systems for each device under test, leading to higher capital costs and slower response times.
Innovation Solution
A two-phase jet impingement testing system that modulates saturation pressure and temperature by adjusting the bypass flow of heated water, eliminating the need for air injection and allowing multiple testing chambers to operate in parallel, with independent control of vapor quality and pressure in each chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If air is injected into the system to modulate saturation pressure, then saturation pressure and temperature can be controlled, but system pressure is reduced and vacuum pump effectiveness is significantly reduced or eliminated
Solution Approach 1:
The patent introduces a condenser as an intermediary component between the testing chamber and vacuum pump. The condenser condenses water vapor before it reaches the vacuum pump, allowing the vacuum pump to maintain effectiveness while still enabling saturation pressure and temperature control through liquid water injection in the testing chamber.
Solution Approach 2:
The patent changes the physical state of water from vapor injection to liquid water injection. By injecting liquid water that evaporates and then condensing it in the condenser, the system can modulate saturation pressure and temperature while preventing vapor from reaching and compromising the vacuum pump.
2Adaptability or versatility
If separate systems are used for each device under test, then each device can be tested independently, but capital costs increase and multiple vacuum pumps are required
Solution Approach 1:
The patent creates a universal testing system where a single vacuum pump and condenser setup can serve multiple testing chambers. Each chamber can be independently controlled through liquid water injection, but they share common vacuum and condensation infrastructure, reducing overall system complexity and capital costs.
Solution Approach 2:
The patent merges multiple testing systems into a unified configuration where multiple testing chambers share common vacuum pumps and condensers. This consolidation reduces the total number of components required while maintaining independent testing capability through individual chamber control mechanisms.
3Stress or pressure
If air injection system with valves is used to control pressure, then saturation pressure can be modulated, but response time slows and efficiency decreases
Solution Approach 1:
The patent replaces the mechanical air injection system with valves with a liquid water injection system. Liquid water can be injected and evaporated more rapidly than air can be injected and pressurized, providing faster response time for saturation pressure modulation while eliminating the need for complex valve systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system reduces test duration, enhances thermal accuracy, and decreases overall testing costs by minimizing equipment requirements and extending vacuum pump life.
Implementation Method 1
a high percentage (e.g., an amount in the range of 5 to 20 percent) of the heated water may turn into water vapor due to the pressure change
Implementation Method 2
the water temperature decreases to the saturation temperature, and a high percentage (e.g., an amount in the range of 5 to 20 percent) of the heated water may turn into water vapor
Implementation Method 3
a high heat removal rate may be achieved with moderate pressure losses using one or more jets impinge liquid onto a heated surface, where it boils
Implementation Method 4
The impinging jets serve to locally enhance convective heat transfer and to actively supply liquid to the boiling surface
Implementation Method 5
a water circulation system configured to convey pressurized heated water
Data Source
AI summary
The various aspects are directed to a two-phase jet impingement testing system having a water circulation system configured to convey pressurized heated water produced by a primary water heater and, optionally, by a secondary heater. A testing chamber is connected to the water circulation system, and the testing chamber includes a support for a device under test, a first inlet configured to introduce heated water from the primary water heater into the testing chamber, a second inlet configured to introduce a secondary heated water into the testing chamber to modulate the saturation pressure and temperature.