JFET Barrier Height Increase via Silicon Carbide Gate

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Solution Overview

Problem

Current semiconductor devices, particularly CMOS technology, face limitations in speed performance due to increased gate capacitance from reduced gate insulator thickness and higher dielectric constants, while JFETs have limited applicability due to low forward-bias turn-on voltage and high power consumption.

Innovation Solution

The development of JFETs with increased barrier height by using materials like silicon carbide and metal gates to raise the diode turn-on voltage without exceeding the p-n junction voltage, reducing gate capacitance and power consumption, and enhancing switching speed.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If gate insulator thickness is reduced to maintain small short-channel effects, then device density increases, but gate capacitance increases and speed performance deteriorates

Engineering Contradiction:
Improvedevice densityVSAvoidspeed performance
Core Design Contradiction:
Volume of moving objectVSSpeed

Solution Approach 1:

The patent changes the material composition of the gate structure by incorporating high-k dielectric materials (such as hafnium oxide, tantalum oxide) to replace traditional silicon dioxide. This parameter change in dielectric constant allows maintaining lower gate capacitance while using thinner gate insulators, thus preserving speed performance while enabling device scaling and higher density.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If higher dielectric constant materials are used to counteract leakage current, then gate leakage is reduced, but gate capacitance increases

Engineering Contradiction:
Improvegate leakage controlVSAvoidgate capacitance
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent employs composite gate structures combining high-k dielectric materials with metal gates (such as tungsten, titanium nitride). This composite approach leverages the high dielectric constant of the oxide layer to reduce leakage while the metal gate provides low resistance and controllable capacitance, achieving both reliability improvement and energy efficiency.

Inventive Principle:
Principle #40Composite materials

3Ease of operation

If JFET gate potential is raised above diode turn-on voltage to turn on the device, then conduction is enabled, but power consumption increases

Engineering Contradiction:
Improvedevice conductionVSAvoidpower consumption
Core Design Contradiction:
Ease of operationVSUse of energy by moving object

Solution Approach 1:

The patent modifies the electrical parameters of the JFET by using high-k dielectric gate insulators that enable operation at lower gate voltages. The enhanced dielectric properties allow the depletion region to be effectively controlled at reduced voltage levels, enabling device conduction without exceeding the diode turn-on voltage threshold, thus maintaining low power consumption while ensuring proper switching operation.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for JFETs with improved electrical characteristics, enabling faster switching speeds and reduced power consumption, making them suitable for a wider range of semiconductor devices without the limitations of traditional CMOS or JFETs.

Implementation Method 1

the gate insulator may be made of a dielectric with a dielectric constant, 'k,' higher than that of silicon dioxide

Methodology Applied
Scientific EffectDielectric: Dielectric

Implementation Method 2

The amount of charge that will switch the MOSFET on or off is proportional to the capacitance of the MOSFET's gate terminal

Methodology Applied
Scientific EffectCapacitance: Capacitance

Implementation Method 3

the depletion region at the gate-channel interface prevents conduction when the gate potential is sufficiently low

Methodology Applied
Scientific EffectDepletion region:

Implementation Method 4

the gate directly contacts the semiconductor body, forming a p-n junction between the gate and the transistor's conductive channel

Methodology Applied
Scientific Effectp-n junction: Diode

Data Source

PatentUS9202871B2JFET devices with increased barrier height and methods of making same
Publication Date: 2015.12.01 MICRON TECHNOLOGY INC
  • US9202871B2 patent drawing
  • US9202871B2 patent drawing
  • US9202871B2 patent drawing

AI summary

Devices for providing transistors with improved operating characteristics are provided. In one example, a system includes a processor and a memory device. A transistor of the processor or the memory device includes a channel in a semiconductor substrate that is undoped or intrinsic. A metal gate is disposed directly on top of the channel, and the bandgap of the semiconductor substrate and the work function of the metal form a Schottky barrier.