Jig Plate Support Layout for Uniform Substrate Pressurization
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in applying a uniform load to elements on a substrate due to variations in parallelism, flatness, and bending of jig plates, leading to potential bonding failures between elements and the substrate, especially with elements of small sizes.
Innovation Solution
A substrate processing apparatus with a support member that adjusts the bending of a lower jig plate using columnar members to distribute load uniformly across the substrate, compensating for variations in load distribution and height differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the lower jig plate is made with high rigidity material or fixed to a rigid frame to suppress bending, then the load uniformity improves, but the apparatus size, weight, or cost increases
Solution Approach 1:
The patent changes the physical parameters of the support members (columnar members) by varying their positions, heights, or stiffness characteristics to dynamically adjust and balance the load distribution across the lower jig plate, achieving uniform load application without requiring high rigidity materials or fixed frames
Solution Approach 2:
The support function is segmented into multiple independent columnar members distributed across the lower jig plate. Each columnar member can independently adjust its supporting force, allowing localized compensation for load non-uniformity without affecting the entire structure, thereby avoiding the need for a rigid frame
2Reliability
If the lower jig plate is made more rigid to reduce bending under load, then bonding reliability improves, but the apparatus becomes more complex and costly
Solution Approach 1:
The patent adjusts the parameters of the columnar members (such as their stiffness, height, or positioning) to compensate for jig plate bending and ensure uniform load distribution, thereby maintaining bonding reliability without increasing structural complexity
Solution Approach 2:
The columnar members act as intermediary elements between the lower jig plate and the support frame. These intermediaries absorb and redistribute the bending effects, allowing the use of a simpler, less rigid jig plate structure while maintaining bonding reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus ensures uniform load application, enhancing mechanical bonding strength and stability between elements and the substrate by balancing load distribution through adjustable support forces, even with small elements and varying surface conditions.
Implementation Method 1
a support member supporting the lower jig plate and providing the lower jig plate with a supporting force in accordance with an in-plane distribution of a load applied to the lower jig plate
Data Source
AI summary
Provided is a substrate processing apparatus capable applying a uniform load to an object to be pressurized. The substrate processing apparatus includes a lower jig plate 46 for arranging a substrate 2 which is an object to be pressurized, an upper jig plate 44 applying pressure to the substrate 2 arranged to the lower jig plate 46, and a support member 45 supporting the lower jig plate 46 and providing a support force to the lower jig plate 46 in accordance with a in-plane distribution of a load applied to the lower jig plate 46.