Jig Substrate Camera Layout for Precise Fork-to-Table Teaching
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Solution Overview
Problem
Current substrate processing systems face challenges in improving the accuracy of substrate transfer positions, particularly in the height direction, due to difficulties in correcting the position of the fork and ensuring the inspection substrate is stationary during image capture.
Innovation Solution
A jig substrate equipped with a first camera for detecting the position of the fork and a second camera for detecting the placing table position, along with a motion sensor to verify the substrate's stationary state, enhances the accuracy of transfer position alignment, including height direction, by capturing and processing image data to adjust the transfer mechanism's position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single camera is used to detect substrate position, then the device complexity is low, but the measurement precision of transfer position including height direction is insufficient
Solution Approach 1:
The detection function is segmented into two specialized cameras: a first camera for detecting fork position and a second camera for detecting placing table position. This segmentation allows each camera to be optimized for its specific detection task, improving overall measurement precision while maintaining manageable system complexity through functional division.
Solution Approach 2:
The system transitions from two-dimensional planar detection to three-dimensional spatial detection by incorporating height direction measurement. The first camera detects fork position including height, and the second camera detects placing table position, enabling comprehensive 3D transfer position accuracy through multi-dimensional detection.
2Productivity
If manual teaching method is used for transfer mechanism, then the device complexity is low, but the productivity and time efficiency are poor
Solution Approach 1:
The manual teaching method is replaced with an automated image-based detection system. Cameras capture images of the fork and placing table, and a processor automatically calculates transfer positions from these images, substituting manual mechanical teaching operations with automated optical sensing and computational processing.
Solution Approach 2:
The system performs self-teaching by automatically capturing images, processing them, and determining transfer positions without external intervention. The processor autonomously calculates the relationship between fork position and placing table position from captured images, enabling the system to teach itself the correct transfer parameters.
Data Source
AI summary
A jig substrate (200) is used in a teaching method for conveyance mechanisms (12a, 12b, 150) and comprises first cameras (202) and second cameras (204). The first cameras (202) capture first image data for detecting the positions of forks (120, 151) of the conveyance mechanisms (12a, 12b, 150). The second cameras (204) capture second image data for detecting the positions of tables (130, 140) on which substrates are placed.