Joint Block Guide Structure to Reduce Fluid Control Assembly Deflection
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Solution Overview
Problem
Miniaturization and integration of fluid control devices for semiconductor manufacturing lead to increased assembly difficulties and maintainability issues, with rail member deflection causing substrate deformation and assembly errors, affecting the flow rate and assembly ability.
Innovation Solution
The fluid control device design features upstream and downstream joint blocks with shorter engaging portions and relief surfaces, supported by a linear guide member, allowing movement and fixation while reducing the span of force action, thus minimizing rail member deflection and assembly errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the fluid control device is miniaturized and integrated, then the responsiveness and flow rate are improved, but the assembly operation becomes difficult and assembly man-hours increase
Solution Approach 1:
The device is divided into joint blocks that can be assembled together to form the fluid control system. Each joint block contains integrated fluid paths, allowing the system to maintain high flow rate while being composed of manageable modular units that are easier to assemble than a fully integrated single piece.
2Ease of manufacture
If the joint block is fixed to the rail member by utilizing reaction force from the guide portion, then the assembly man-hours are reduced, but the rail member deflects and the substrate is deflected deteriorating assembling ability
Solution Approach 1:
A guide portion is introduced as an intermediary element between the joint block and the rail member. This guide portion distributes the reaction force over a larger area and provides a stable reference surface, preventing direct point-loading that causes deflection of the rail member and substrate, while still enabling simple bolting assembly.
3Ease of manufacture
If the assembly is slightly bent due to assembly error, then the end portion of each joint block is easily caught by the engaging surface of the rail member, but this worsens the assembly workability
Solution Approach 1:
The guide portion is designed with a geometry that provides a gradual transition and clearance, cushioning against the effects of assembly errors. The guide portion's shape allows for slight misalignments and bends without causing the joint block to catch on the rail member, preventing assembly failures before they occur.
Data Source
AI summary
A fluid control device includes; upstream side and downstream side joint blocks defining a fluid flow path, and having engaging portions at a bottom surface side; a support member having a guide portion to which the engaging portions of the upstream side and downstream side joint blocks can be engaged; and a fluid device supported by the support member via the upstream side and the downstream side joint blocks; wherein the upstream side and the downstream side joint blocks are fixed to the guide portion by utilizing a reaction force against a bending force generated by the tightening force of fastening bolts to the upstream side and the downstream side joint blocks and the fluid device connected together, and the length of the engaging portions in the longitudinal direction of the joint blocks is formed shorter than the length of the joint blocks.