Vacuum-Bridged Josephson Junctions for Reduced Qubit Interface Loss

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Solution Overview

Problem

Losses at interfaces between different materials in superconducting devices, particularly Josephson junctions, lead to reduced performance and coherence time in qubits, such as transmon qubits, due to parasitic effects.

Innovation Solution

The integration of bridge connections between the Josephson junction and external electrodes, formed using a method involving resist patterning and superconducting thin film deposition, ensures that no part of the Josephson junction is in direct contact with the electrodes, thereby minimizing parasitic effects and reducing interface losses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the Josephson junction is directly connected to external electrodes, then the device complexity is reduced, but interface losses increase leading to lower qubit coherence time

Engineering Contradiction:
Improvequbit coherence timeVSAvoiddevice structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Bridge connections are introduced as intermediary elements between the Josephson junction and external electrodes. These bridges are formed of superconducting material and connect to the Josephson junction at contact pads, providing an indirect connection path that eliminates direct contact between the junction and external electrodes, thereby reducing interface losses and improving coherence time

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The connection path is segmented into distinct components: the Josephson junction, bridge connections, and external electrodes. The bridge connections are separated from the substrate using sacrificial sacrificial oxide layers, creating spatial segmentation that isolates the Josephson junction from lossy interfaces with external electrodes while maintaining electrical connectivity

Inventive Principle:
Principle #1Segmentation

2Reliability

If bridge connections are introduced to reduce interface losses, then qubit performance improves, but the fabrication process complexity increases

Engineering Contradiction:
Improvequbit performanceVSAvoidfabrication process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

Contact pads are pre-formed on the Josephson junction during the junction fabrication process itself, before the bridge connections are created. The sacrificial oxide layers are also deposited in advance, preparing the structure for subsequent bridge formation and lift-off processes

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

Traditional direct mechanical/electrical contact is replaced with a suspended bridge structure. The bridges are formed using deposition and lift-off techniques, and the sacrificial oxide layers are removed through chemical etching, substituting direct contact with a more complex but lower-loss indirect connection

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the performance and coherence time of superconducting qubits by reducing parasitic effects and interface losses, leading to improved operational efficiency in quantum processing units.

Implementation Method 1

superconducting devices including Josephson junctions

Methodology Applied
Scientific EffectJosephson effect: Josephson Effect

Implementation Method 2

depositing a superconducting thin film over the resist

Methodology Applied
Scientific EffectPhysical vapor deposition: Physical Vapour Deposition

Data Source

PatentEP4344393A1Superconducting vacuum-bridged josephson junctions
Publication Date: 2024.03.27 IQM FINLAND OY
  • EP4344393A1 patent drawingFigure 1
  • EP4344393A1 patent drawingFigure 2A~2B
  • EP4344393A1 patent drawingFigure 3A~3B

AI summary

The invention relates to the field of superconducting integrated circuits. The invention includes an integrated circuit device comprising a substrate (201), a Josephson junction (210) on the substrate (201), external electrodes (202 a,b) on the substrate (201) and spaced apart from the Josephson junction (210), and bridge connections (502 a,b) connecting the Josephson junction (210) to the external electrodes (202 a,b). The invention also includes a method for manufacturing such an integrated circuit device.