Josephson Junction Barrier Shaping for High Normal Resistance

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Solution Overview

Problem

Existing methods for manufacturing Josephson junctions struggle to achieve high normal resistance at relatively high temperatures, with low resistance at higher temperatures and increased resistance requiring operation at lower temperatures.

Innovation Solution

A method involving the selective removal and ion irradiation of a superconducting layer to create a thin central barrier with reduced dimensions, increasing normal resistance without altering the operating temperature of the superconducting materials, by using a lithographic process to define zones with distinct materials and energies for irradiation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a low dose of irradiation or thin barrier is used, then the Josephson junction can operate at higher temperatures (around 70 K), but the normal resistance is too low (a few tenths of an Ohm)

Engineering Contradiction:
Improveoperating temperatureVSAvoidnormal resistance
Core Design Contradiction:
TemperatureVSManufacturing precision

Solution Approach 1:

The patent applies local quality by creating a non-uniform barrier structure where the central zone has reduced dimensions (smaller in transverse direction) compared to lateral zones. This localized modification of the barrier geometry in specific regions allows the junction to maintain high normal resistance while preserving the temperature characteristics achieved by low-dose irradiation. The selective thinning of the barrier in the central zone concentrates the current path, increasing resistance without requiring higher overall barrier thickness that would lower operating temperature.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent exploits dimensional changes by reducing the transverse dimension of the barrier in the central zone while maintaining the longitudinal dimension. This dimensional modification in the transverse direction creates a bottleneck effect for current flow, increasing normal resistance. By operating in the transverse dimension rather than increasing barrier thickness in the longitudinal direction, the solution maintains the operating temperature benefits of thin barriers while achieving the desired resistance increase.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If a high dose of irradiation or increased barrier thickness is used, then the normal resistance of the Josephson junction increases, but operation requires lower temperatures (30-40 K)

Engineering Contradiction:
Improvenormal resistanceVSAvoidoperating temperature
Core Design Contradiction:
Manufacturing precisionVSTemperature

Solution Approach 1:

Instead of uniformly increasing barrier thickness or irradiation dose throughout the entire junction, the patent applies local quality by concentrating the barrier modification specifically in the central zone with reduced transverse dimensions. This localized approach increases normal resistance through geometric concentration of current paths rather than through increased barrier thickness, thereby avoiding the temperature penalty that would result from uniform barrier thickening or high-dose irradiation.

Inventive Principle:
Principle #3Local quality

3Productivity

If the superconducting layer thickness is increased to obtain low inductance, then the loop inductance decreases, but the Josephson junction thickness must remain thin to maintain high normal resistance

Engineering Contradiction:
Improveloop inductanceVSAvoidnormal resistance
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies segmentation by dividing the barrier into distinct zones: a central zone with reduced transverse dimensions and lateral zones with full width. This segmentation allows different regions to serve different functions - the central zone controls normal resistance through its reduced dimensions, while the overall barrier structure (including lateral zones) can be optimized for inductance characteristics. The segmented approach decouples the design constraints, allowing independent optimization of resistance and inductance parameters.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in a Josephson junction suitable for operation between 40 K and 80 K with increased normal resistance, maintaining high sensitivity and ease of manufacture, suitable for applications like SQUID devices with low loop inductance and high resistance.

Implementation Method 1

a step of irradiating ions in a central zone of the layer defined in the longitudinal direction

Methodology Applied
Scientific EffectIon irradiation: Ion Beam

Implementation Method 2

the Josephson effect sometimes called the Josephson tunneling effect. To explain the latter phenomenon, consider two superconductors separated by a thin insulating barrier through which Cooper pairs can quantum tunnel

Methodology Applied
Scientific EffectJosephson effect: Josephson Effect

Data Source

PatentEP3053202B1Process for manufacturing a josephson junction and associated josephson junction
Publication Date: 2021.10.13 THALES SA
  • EP3053202B1 patent drawingFigure 1~3
  • EP3053202B1 patent drawingFigure 4~5
  • EP3053202B1 patent drawing

AI summary

The invention relates to a process for manufacturing a Josephson junction (10) comprising: a step of providing a substrate (12) extending along a longitudinal direction (d1); a step of depositing a superconducting layer (14) on the substrate (12) so that this layer (14) extends from the substrate (12) in a transverse direction (d2), perpendicular to the longitudinal direction (d1); and a step of irradiating with ions a central zone (24) of the layer (14) defined in the longitudinal direction (d1), the process being characterized in that it comprises, before the irradiating step: a step of removing a portion of the central zone (24) of the superconducting layer (14) so as to delimit an array of zones (20, 22, 24) in the superconducting layer (14), said zones being aligned in the longitudinal direction (d1) and comprising the central zone (24) and two lateral zones (20, 22).