Junction Block Gas Concentration Sensing in Tight Installation Space
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Solution Overview
Problem
Conventional in-line concentration measurement devices for gas supply systems in semiconductor manufacturing are becoming more compact, but they require significant installation space, which is scarce in modern semiconductor equipment with numerous connected devices.
Innovation Solution
A concentration measurement device integrated into the gas supply system, utilizing a junction block with a light source, photodetector, and arithmetic control circuit, where translucent windows and optical paths are sealed and fixed to the junction block, allowing compact integration without extensive space requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a conventional in-line concentration measurement device is installed separately downstream of the integrated gas supply system, then the device can measure gas concentration accurately, but the installation space required increases
Solution Approach 1:
The patent combines the concentration measurement device with the junction block by integrating the optical system (light source, photodetector, optical paths) directly into the junction block structure. The translucent windows are sealed and fixed to the junction block, creating a unified integrated device that eliminates the need for separate installation space downstream
Solution Approach 2:
The junction block is designed to serve multiple functions: it acts as both the gas distribution manifold and the concentration measurement device. The same junction block that distributes gas to multiple lines also houses the optical components for measuring gas concentration, making the device multi-functional and space-efficient
2Area of stationary object
If the measurement device is made more compact to reduce installation space, then the device size decreases, but the integration complexity increases
Solution Approach 1:
The optical system is segmented into distinct functional components (light source, optical paths, photodetector, translucent windows) that are separately integrated into the junction block. This segmentation allows for modular assembly and simplifies the integration process while maintaining compact dimensions
Solution Approach 2:
The translucent windows serve as intermediary elements that facilitate the integration of the optical system into the junction block. These windows allow light to pass through while being sealed and fixed to the junction block, enabling compact integration without requiring complex sealing or mounting mechanisms
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables compact integration of the concentration measurement device into the gas supply system, reducing installation space and maintaining accurate gas concentration measurement capabilities.
Implementation Method 1
a concentration measurement device for detecting concentration of a gas based on an absorbance of light transmitted through a gas
Implementation Method 2
the concentration of the fluid can be determined according to the Lambert-Beer law, etc.
Data Source
AI summary
A concentration measurement device 20 for measuring the concentration of the a gas flowing through a junction block 14 connected to a plurality of gas supply lines includes a light source 40 for generating light incident to a flow path formed in the junction block, a photodetector 44 for receiving light emitting from the flow path, and an arithmetic control circuit 46 for determining the concentration of the gas flowing through the flow path based on the output of the photodetector, translucent incident windows 26 and 23 for making light from the light source incident to the flow path and, at least one of the translucent emitting windows 28 and 23 for emitting light passing through the flow path being sealed and fixed to the junction block 14.