Kerr Electro-Optical Modulator With Interface Carrier Trapping

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Solution Overview

Problem

Existing electro-optical Kerr effect modulators suffer from modulation of the phase of the electromagnetic wave being influenced by both the Kerr effect and the plasma dispersion effect, leading to degradation in performance and limited maximum modulation frequency due to variations in free carrier density and optical absorption.

Innovation Solution

Trapping free carriers at the interface between the core and optical cladding of the waveguide using ionizing radiation, followed by thermal annealing to reduce their concentration, thereby eliminating the plasma dispersion effect and chirp, and allowing pure phase modulation with higher maximum modulation frequency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a pn-type junction or pin-type structure is used in the waveguide core, then the Kerr effect enables phase modulation, but the plasma dispersion effect causes unwanted amplitude modulation and chirp

Engineering Contradiction:
Improvemodulation purityVSAvoidplasma dispersion effect
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and removes free carriers from the core region where they cause harmful plasma dispersion effects. By applying ionizing radiation, free carriers are generated and then extracted/trapped at the core-cladding interface, separating them from the optical mode region. This eliminates the plasma dispersion effect while preserving the Kerr effect phase modulation capability.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent converts the harmful plasma dispersion effect into a beneficial mechanism by using ionizing radiation to generate free carriers that are then trapped at the interface. The trapped carriers create a potential well that prevents further carrier generation in the core, effectively using the carrier generation process to suppress the harmful effect.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Ease of operation

If free carriers are present in the core, then electrical field application is enabled, but optical absorption increases causing chirp and limiting maximum modulation frequency

Engineering Contradiction:
Improveelectrical field applicationVSAvoidoptical absorption
Core Design Contradiction:
Ease of operationVSLoss of energy

Solution Approach 1:

The patent extracts free carriers from the optical mode region by trapping them at the core-cladding interface using ionizing radiation. This removal of carriers from the core region reduces optical absorption and chirp while maintaining the ability to apply electrical fields for Kerr effect modulation.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent moves the free carrier population from the two-dimensional core region to the one-dimensional interface between core and cladding. This dimensional relocation concentrates carriers at the boundary where they no longer interact with the optical mode, reducing absorption losses while preserving electrical control capability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If ionizing radiation is applied to trap free carriers at the interface, then plasma dispersion effect is eliminated, but free carrier concentration at interface increases

Engineering Contradiction:
Improvephase modulation purityVSAvoidfree carrier concentration at interface
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The patent extracts free carriers from the harmful core region and relocates them to the core-cladding interface. Although carrier concentration increases at the interface, this spatial separation removes carriers from the optical mode region, eliminating plasma dispersion effects and chirp while maintaining Kerr effect functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method achieves pure phase modulation without significant amplitude modulation, enhancing the maximum modulation frequency and reducing optical losses by concentrating free carriers at the interface, thus improving the electro-optical modulator's performance.

Implementation Method 1

irradiate the interface with ionizing radiation so as to trap free carriers from the pn-type junction or the pin-type structure at the interface

Methodology Applied
Scientific EffectIonizing radiation: Ionisation

Implementation Method 2

trap free carriers from the pn-type junction or the pin-type structure at the interface

Methodology Applied
Scientific EffectCarrier trapping: Adsorption

Implementation Method 3

step c) is followed by a thermal annealing step carried out according to a thermal budget adapted to reduce the concentration of free carriers trapped at the interface

Methodology Applied
Scientific EffectThermal annealing: Annealing

Implementation Method 4

a core, including a pn-type junction or a pin-type structure

Methodology Applied
Scientific EffectDoping: Dopants

Implementation Method 5

the variation in the density of free carriers, originating from the pn-type junction or the pin-type structure

Methodology Applied
Scientific EffectCarrier generation:

Implementation Method 6

polarize the pn-type junction or the pin-type structure so as to apply an electric field within the core

Methodology Applied
Scientific EffectKerr effect: Kerr Effect

Data Source

PatentEP4560389B1Method of making a kerr effect electro-optical modulator
Publication Date: 2025.12.10 COMMISSARIAT A LENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
  • EP4560389B1 patent drawingFigure 1~2
  • EP4560389B1 patent drawingFigure 3~4
  • EP4560389B1 patent drawingFigure 5

AI summary

A method of manufacturing a Kerr effect electro-optical modulator, comprising the steps of: a) using a substrate (1); b) forming a waveguide (2) on the substrate (1) so as to guide propagation of an electromagnetic wave, the waveguide (2) comprising: - a core (20), comprising a pn-type junction or a pin-type structure; - an optical cladding (21), surrounding the core (20); the core (20) and the optical cladding (21) having an interface (I); c) irradiating the interface (I) with ionizing radiation so as to trap at the interface (I) free carriers originating from the pn-type junction or the pin-type structure; d) polarizing the pn-type junction or the pin-type structure so as to apply an electric field within the core (20).