Ketone Solvent Copolymerization for High Conversion
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Solution Overview
Problem
The conventional method for producing α-alkylstyrene α-chloroacrylate copolymer using dioxane as a polymerization solvent results in a low monomer conversion rate, limiting the efficiency of the production process.
Innovation Solution
Using ketone, specifically cyclic ketones like cyclopentanone or cyclohexanone, as the polymerization solvent in solution polymerization to improve the monomer conversion rate and facilitate efficient production of the copolymer, which can be used as a positive resist in semiconductor fabrication.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If dioxane is used as polymerization solvent, then the copolymer can be produced with controlled molecular weight and distribution, but the monomer conversion rate is low
Solution Approach 1:
The patent changes the polymerization solvent from dioxane to ketone (specifically cyclopentanone or cyclohexanone), which fundamentally alters the reaction environment and improves monomer conversion rate while maintaining molecular weight control capabilities
2Ease of operation
If conventional solution polymerization is used with dioxane, then the process is simple and easy to operate, but the production efficiency is low due to low monomer conversion
Solution Approach 1:
The patent maintains the simplicity of solution polymerization while changing the solvent parameter to ketone, achieving both ease of operation and improved production efficiency through higher monomer conversion rates
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method significantly enhances the monomer conversion rate and enables the efficient production of α-alkylstyrene α-chloroacrylate copolymer, improving its properties for use as a positive resist in semiconductor manufacturing with improved dry etching resistance and sensitivity.
Implementation Method 1
performing solution polymerization of a monomer composition containing α-alkylstyrene and α-chloroacrylate by using ketone as a polymerization solvent
Implementation Method 2
a polymer having enhanced solubility to a developing solution due to its main chain cut by irradiation of ionizing radiation such as electron beams or short wavelength light such as ultraviolet rays
Data Source
AI summary
The present disclosure provides a method for efficiently producing an α-alkylstyrene α-chloroacrylate copolymer having a high monomer conversion rate. According to the present disclosure, the method for producing a copolymer containing 30 mol% to 70 mol% of an α-alkylstyrene unit and 30 mol% to 70 mol% of an α-chloroacrylate unit includes a step of performing solution polymerization of a monomer composition containing α-alkylstyrene and α-chloroacrylate, and uses ketone as a polymerization solvent for the solution polymerization.