Lockable Key Switch Control for Remote Access Lockout

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Solution Overview

Problem

Existing substrate processing systems face safety hazards and operational inefficiencies due to remote access capabilities, which can lead to unintended system activations during repairs or service, resulting in potential injuries and data loss.

Innovation Solution

The implementation of a lockout and/or tagout control system that uses a lockable key switch to enable and disable remote computer control signals, ensuring that remote access is only allowed when the system is safely powered down and ready for operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If remote access capabilities are enabled for substrate processing systems, then system operability and monitoring are improved, but safety hazards increase due to potential unintended activations during repairs

Engineering Contradiction:
Improveremote access capabilityVSAvoidsafety hazard
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

A physical key switch is introduced as an intermediary device between the remote operator and the system controls. This key switch must be physically present at the system location and manually operated to enable or disable remote access, creating a physical barrier that prevents unintended activations while maintaining remote operational capability when needed.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The key switch is configured to require preliminary manual action by a local technician before remote access can be established. The technician must physically locate and operate the key switch to an 'enabled' position before any remote commands can be transmitted, ensuring the system is in a safe state before remote operation begins.

Inventive Principle:
Principle #10Preliminary action

2Object-affected harmful factors

If Ethernet connection is physically disconnected to prevent remote activation, then safety is improved, but system availability and repair efficiency deteriorate

Engineering Contradiction:
Improveunintended activationVSAvoidsystem availability
Core Design Contradiction:
Object-affected harmful factorsVSProductivity

Solution Approach 1:

The system transitions from a static disconnected state to a dynamic controlled state. The key switch enables the system to dynamically transition between disabled and enabled states based on operational needs, allowing remote access to be temporarily restored after repairs without permanent disconnection or complex reconfiguration procedures.

Inventive Principle:
Principle #15Dynamics

3Ease of operation

If technician manually manages Ethernet connection, then control over remote access is improved, but human error increases leading to forgotten disconnections or incorrect reconnections

Engineering Contradiction:
Improvecontrol over remote accessVSAvoidhuman error
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The key switch is designed to be self-evident and self-enforcing. Its physical presence and required operation create an automatic control mechanism that does not rely on technician memory or attention. The switch's position clearly indicates whether remote access is enabled or disabled, and its physical operation requirement ensures intentional activation, reducing human error.

Inventive Principle:
Principle #25Self-service

Data Source

PatentUS20250076830A1Remote computer access lockout systems and methods for substrate processing systems
Publication Date: 2025.03.06 ASM IP HLDG BV
  • US20250076830A1 patent drawing
  • US20250076830A1 patent drawing
  • US20250076830A1 patent drawing

AI summary

Substrate processing systems and methods include selectively activatable remote computer access having lockout and/or tagout controls and/or features. Such substrate processing systems may include: (a) a first network switch including an input port and an output port; (b) a second network switch including an input/output port directly or indirectly connected with the first switch output port; (c) a lockable key switch provided in a power supply line and movable between OFF and ON positions; and (d) a key for moving the key switch between ON and OFF. When ON, an electrical circuit for supplying power to the first network switch and/or second network switch is completed, enabling remote computer control of the substrate processing system. When OFF, an electrical circuit for supplying power to the first network switch and/or second network switch is interrupted, thereby disabling remote computer control. The key can only be removed when in the OFF position.