L-Shaped MEMS Package Vibration Immunity

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Solution Overview

Problem

Existing vertical mount MEMS packages are susceptible to vibration, package tilt, and have limitations in EMI shielding, stress isolation, solder joint reliability, and cost, making them unsuitable for applications requiring robustness and reliability, especially in automotive systems like vehicle stability control.

Innovation Solution

A vertical mount MEMS package design featuring an L-shaped substrate with a vertical and horizontal portion, including a mounting region, bond pads, interconnects, and leads, which provides a low profile, vibration immunity, and EMI shielding, while allowing for easy inspection of solder joints, using materials like polymeric or ceramic substrates for improved reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If existing vertical mount MEMS packages are used, then the MEMS device can be mounted vertically, but the package is susceptible to vibration and package tilt

Engineering Contradiction:
Improvevibration immunityVSAvoidsusceptibility to vibration and tilt
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The substrate is divided into two distinct portions: a vertical portion for mounting the MEMS die and a horizontal portion for providing stability and vibration immunity. This segmentation allows each portion to be optimized for its specific function, with the horizontal portion acting as a stable base that resists vibration and tilt while the vertical portion provides the necessary mounting surface.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The substrate transitions from a traditional planar structure to a three-dimensional L-shaped structure with both vertical and horizontal portions. This dimensional change allows the package to achieve vibration immunity and stability while maintaining vertical mounting capability, as the horizontal portion provides a stable base that counteracts vibrational forces.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If existing MEMS packages are used, then electrical connection can be established, but EMI shielding is limited

Engineering Contradiction:
ImproveEMI shieldingVSAvoidelectromagnetic interference
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The substrate is constructed from materials with complementary properties that provide both mechanical support and electromagnetic interference shielding. The combination of materials in the L-shaped substrate creates a composite structure that simultaneously achieves electrical connectivity, mechanical stability, and EMI shielding capabilities.

Inventive Principle:
Principle #40Composite materials

3Reliability

If existing MEMS packages are used, then the device can be packaged, but solder joint reliability is compromised

Engineering Contradiction:
Improvesolder joint reliabilityVSAvoidsolder joint failure
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The substrate design segments the mounting functions, with the horizontal portion providing a stable, vibration-resistant base for solder joints and the vertical portion providing the MEMS die mounting surface. This segmentation isolates the solder joints from vibrational stresses, improving their reliability.

Inventive Principle:
Principle #1Segmentation

4Reliability

If existing MEMS packages are used, then standard packaging can be implemented, but cost increases

Engineering Contradiction:
Improvecost-effectivenessVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The L-shaped substrate performs multiple functions simultaneously: it provides mechanical support, vibration immunity, EMI shielding, and electrical connectivity. By integrating these functions into a single substrate structure, the design reduces the need for additional components and assembly steps, thereby lowering manufacturing costs while improving reliability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS8692366B2Apparatus and method for microelectromechanical systems device packaging
Publication Date: 2014.04.08 ANALOG DEVICES INC
  • US8692366B2 patent drawing
  • US8692366B2 patent drawing
  • US8692366B2 patent drawing

AI summary

A MEMS package includes a substrate having an L-shaped cross-section. The substrate includes a vertical portion having a front surface and a back surface, and a horizontal portion protruding from a lower part of the front surface of the vertical portion, wherein the front surface of the vertical portion includes a mounting region. A MEMS die is mounted on the mounting region such that the MEMS die is oriented substantially parallel to the front surface; a lid attached to the front surface of the substrate while covering the MEMS die; and a plurality of leads formed on a bottom surface of the substrate. The leads can extend substantially parallel to one another, and substantially perpendicular to the front surface. The MEMS die can be oriented substantially perpendicular to a PCB substrate on which the package is mounted.