L-Shaped P-N Junction Modulator for High-Speed Photonic Circuits

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Solution Overview

Problem

The challenge in photonic integrated circuits is to increase modulation speed while maintaining low bit error rates, as reducing electron/hole lifetime in waveguide structures can lead to reduced Q-factors and increased bit error rates due to increased full-width at half-maximum resonant wavelength line shapes.

Innovation Solution

An L-shaped P-N junction is introduced in the optical modulator structure, with a first portion extending along the side and a second portion extending along the top, increasing the overlap area and modulation efficiency, achieved through CMOS manufacturing techniques like self-aligned ion implantation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If electron/hole lifetime is reduced in waveguide structures to increase modulation speed, then modulation speed is improved, but Q-factor is reduced and bit error rate increases

Engineering Contradiction:
Improvemodulation speedVSAvoidbit error rate
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent divides the doped region into multiple segments (first doped region, second doped region, third doped region) with different dopant types and concentrations. This segmentation allows different portions of the waveguide to have optimized carrier lifetimes - some regions with shorter lifetimes for speed and others with longer lifetimes for maintaining Q-factor, thereby resolving the contradiction between modulation speed and bit error rate.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies different dopant types and concentrations to different spatial locations within the waveguide structure. Specifically, n-type dopants are applied in certain regions while p-type dopants are applied in other regions, creating local variations in carrier recombination rates. This local quality differentiation enables simultaneous optimization of modulation speed in high-speed regions and Q-factor in stable regions.

Inventive Principle:
Principle #3Local quality

2Productivity

If P-N junction overlap area is increased to improve modulation efficiency, then modulation amplitude is improved, but device complexity increases

Engineering Contradiction:
Improvemodulation efficiencyVSAvoiddevice complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent extends the P-N junction overlap from a simple planar configuration into the vertical dimension by creating multiple doped regions at different depths and lateral positions. The first, second, and third doped regions are positioned to create a three-dimensional overlap structure that maximizes the interaction area between opposite polarity regions, thereby increasing modulation efficiency without simply expanding the planar footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent combines multiple doped regions (first, second, and third doped regions) into a unified P-N junction structure where n-type and p-type dopants are strategically positioned to create extensive overlap. This merging of multiple doped zones into a single functional P-N junction achieves high modulation efficiency while maintaining a compact integrated structure rather than using separate components.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances modulation amplitude and reduces bit error rates, particularly in high-bandwidth applications like telecommunications and data centers, by varying charge carrier concentrations around the L-shaped P-N junction.

Implementation Method 1

The optical modulator structure includes a first region including a first dopant type and a second region, on a top surface of the first region, including a second dopant type different from the first dopant type. The first region and the second region correspond to a P-N junction diode of the optical modulator structure.

Methodology Applied
Scientific EffectDoping: Dopants

Implementation Method 2

The first region and the second region correspond to a P-N junction diode of the optical modulator structure

Methodology Applied
Scientific EffectP-N junction: Diode

Implementation Method 3

achieved through CMOS manufacturing techniques like self-aligned ion implantation

Methodology Applied
Scientific EffectIon implantation: Ion Implantation

Data Source

PatentUS20240402521A1Semiconductor photonics device and methods of formation
Publication Date: 2024.12.05 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240402521A1 patent drawing
  • US20240402521A1 patent drawing
  • US20240402521A1 patent drawing

AI summary

An optical modulator structure in a photonic integrated circuit includes an L-shaped P-N junction at an optical mode of the optical modulator structure (e.g., an area of the optical modulator structure in which light is generated). The L-shaped P-N junction provides increased area of overlap of the P-N junction at the optical mode relative to another type of junction, such as a horizontal junction or I-shaped junction. The increased area of overlap may enable the optical modulator structure to achieve a greater modulation efficiency.