LA-ICP-MS Laser Ablation Control for Stacked Memory Analysis
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Solution Overview
Problem
In three-dimensional memory cell arrays with stacked structures, the varying ablation rates of different materials make it difficult to control the ablation process accurately, leading to challenges in recognizing the shape and accurately profiling the metal elements within the stacked structure.
Innovation Solution
An LA-ICP-MS apparatus with a stage, light source, film thickness measurement unit, and controller that adjusts laser beam irradiation conditions based on real-time thickness measurements to maintain a consistent ablation rate, ensuring accurate quantitative analysis of metal elements across different materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If laser ablation is performed on stacked structures with different materials, then quantitative analysis of metal elements can be achieved, but the ablation rate varies greatly between different materials making it difficult to control
Solution Approach 1:
The system measures the thickness of the ablated portion in real-time during the laser ablation process and feeds this information back to the controller. The controller then adjusts laser irradiation conditions (such as power, pulse duration, or scanning speed) to maintain a substantially constant ablation rate despite variations in material composition within the stacked structure.
Solution Approach 2:
The laser irradiation conditions are made dynamically adjustable during the ablation process. The system transitions from static, fixed laser parameters to dynamic parameters that can be modified in real-time based on measured thickness and material variations, enabling adaptive control of the ablation rate.
2Measurement precision
If laser ablation is performed on stacked structures with different materials, then metal element analysis can be conducted, but it becomes difficult to correctly recognize the shape of the stacked structure in the depth direction
Solution Approach 1:
Real-time thickness measurement feedback enables the system to track the actual ablation depth and compare it with the expected depth based on the known stacked structure design. This allows for correct recognition and mapping of the three-dimensional shape of the stacked structure in the depth direction, compensating for variations in ablation rates across different materials.
3Manufacturing precision
If real-time thickness measurement and control is implemented, then ablation rate control is improved, but device complexity increases
Solution Approach 1:
The measurement unit serves multiple functions: it measures the thickness of the ablated portion for feedback control, characterizes the stacked structure composition, and enables three-dimensional shape recognition. This multi-functionality reduces the need for separate specialized devices, thereby limiting the increase in overall system complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves precise control of ablation rates and accurate quantitative analysis of metal elements in stacked structures, even when multiple materials with different ablation rates are involved, enhancing the analysis of complex memory cell arrays.
Implementation Method 1
a laser ablation-inductively coupled plasma-mass spectrometer (LA-ICP-MS) apparatus vaporizes a sample by irradiating the sample with a laser beam using a laser ablation device
Data Source
AI summary
According to one embodiment, an analysis apparatus includes a stage on which to place a sample, a light source, a film thickness measurement unit, and a controller. The light source generates a laser beam to irradiate the sample with the laser beam to cause vaporization of the sample. The film thickness measurer measures a thickness of the sample at a first position where the laser beam irradiates the sample. The controller controls at least one irradiation condition of the laser beam based on the measured thickness of the sample.