Labyrinth Seal Substrate Container Reduces Friction Particles
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate storage containers face challenges in reducing particle generation due to friction when opening and closing the lid while maintaining sealability, especially when positive pressure is applied inside the container.
Innovation Solution
A substrate storage container design featuring a labyrinth seal structure between the container body and the lid, where the first part of the container body is non-contact with the second part of the lid, forming a seal that reduces friction and maintains sealability against both positive and negative pressures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a packing made of elastomers is used to ensure sealability, then the sealability against negative pressure is improved, but particles are generated by friction during opening and closing operations
Solution Approach 1:
The patent removes the elastomeric packing material from the sealing system entirely. Instead of using a separate packing component that contacts the seal face, the invention creates a labyrinth seal structure formed by the container body and lid themselves, eliminating the source of friction-generated particles while maintaining sealing functionality through a different mechanical principle
Solution Approach 2:
The patent replaces the traditional elastomeric packing mechanical system with a labyrinth seal structure. The sealing mechanism shifts from elastic deformation and friction-based sealing to a geometry-based flow restriction system where the lid and container body form interlocking surfaces that prevent particle generation through contactless sealing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The labyrinth seal structure effectively minimizes particle generation from friction while ensuring high sealability, preventing contamination and maintaining airtight conditions during lid operations.
Implementation Method 1
a first part of the container body, the first part being provided around the opening, is non-contact at least partially with a second part of the lid, the second part being opposed to the first part; and the first part and the second part cooperatively form a labyrinth seal structure
Data Source
AI summary
The sealability against interior positive pressure is ensured, while reducing particles generated by friction in opening and closing a lid. Disclosed is a substrate storage container, including: a container body configured to store at least one substrate; and a lid configured to close an opening of the container body. In the substrate storage container, a first part of the container body, the first part being provided around the opening, is non-contact at least partially with a second part of the lid, the second part being opposed to the first part; and the first part and the second part cooperatively form a labyrinth seal structure.