Lamb-Wave Piezoelectric Resonators for Wideband 5G Filtering

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Solution Overview

Problem

Current acoustic filters face challenges in scaling frequencies beyond 6 GHz for 5G applications due to limitations in electromechanical coupling and spurious modes, which restrict their bandwidth and performance in meeting the demands of sub-6 GHz spectrum requirements.

Innovation Solution

The development of acoustic resonators using first-order antisymmetric Lamb-wave modes in Z-cut and Y-cut piezoelectric thin films, such as lithium niobate (LiNbO3) or lithium tantalate (LiTaO3), with optimized electrode designs to enhance electromechanical coupling and suppress spurious modes, allowing for wider bandwidth and improved filter performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional acoustic filters are used for 4G applications, then they achieve acceptable performance at lower frequencies, but they fail to scale effectively beyond 6 GHz for 5G applications

Engineering Contradiction:
Improveoperating frequencyVSAvoidfilter performance
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent changes the operating parameters by transitioning from conventional bulk acoustic wave modes to surface acoustic wave modes, and further to guided acoustic wave modes in thin-film structures. This parameter change enables the filter to operate effectively at higher frequencies (up to 28 GHz) while maintaining performance characteristics suitable for 5G applications.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces conventional mechanical acoustic filter structures with a hybrid approach that integrates acoustic resonators with electromagnetic circuit elements. This substitution allows the system to overcome the inherent limitations of purely mechanical acoustic filters at high frequencies while maintaining the benefits of acoustic wave filtering.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Speed

If acoustic filters are scaled to higher frequencies, then they can support 5G spectrum requirements, but spurious modes increase and degrade filter performance

Engineering Contradiction:
Improveoperating frequencyVSAvoidspurious modes
Core Design Contradiction:
SpeedVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and eliminates spurious modes by carefully designing the acoustic resonator structure to support only the desired fundamental acoustic mode. Through precise control of resonator geometry, material selection, and boundary conditions, harmful spurious modes are suppressed while the fundamental mode is enhanced for optimal filtering performance.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent employs dynamic mode selection where the acoustic resonator is designed to operate in specific vibrational modes that can be dynamically controlled. By adjusting operating conditions and resonator parameters, the system can selectively activate desired modes while suppressing spurious modes, enabling clean signal filtering at high frequencies.

Inventive Principle:
Principle #15Dynamics

3Adaptability or versatility

If conventional acoustic resonator designs are used, then they are simple in structure, but electromechanical coupling is insufficient for wide bandwidth requirements

Engineering Contradiction:
ImprovebandwidthVSAvoidresonator structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent employs composite material structures combining piezoelectric thin films with metallic electrodes and dielectric layers. This composite approach enhances electromechanical coupling by leveraging the complementary properties of different materials, achieving wide bandwidth performance while maintaining a relatively compact and integrated resonator structure.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent transitions from three-dimensional bulk acoustic resonators to two-dimensional surface acoustic wave structures, and further to thin-film guided wave structures. This dimensional reduction enhances the surface-to-volume ratio, improving electromechanical coupling efficiency and enabling wider bandwidth operation with reduced device complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves high electromechanical coupling coefficients and quality factors, enabling acoustic filters with expanded bandwidth and reduced spurious responses, effectively addressing the limitations of existing filters in supporting 5G frequency ranges.

Implementation Method 1

A piezoelectric thin film can be disposed on a carrier substrate. The piezoelectric thin film can be a Y-cut lithium niobate (LiNbO3) or lithium tantalate (LiTaO3) thin film adapted to propagate a first order antisymmetric (A1) mode

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

A number of pairs of interdigital transducers can be disposed on the piezoelectric thin film. The piezoelectric thin film and the number of pairs of IDTs can form a resonator

Methodology Applied
Scientific EffectElectromechanical coupling: Piezoelectric Effect

Data Source

PatentUS11996820B2Fifth-generation (5G)-focused piezoelectric resonators and filters
Publication Date: 2024.05.28 THE BOARD OF TRUSTEES OF THE UNIV OF ILLINOIS
  • US11996820B2 patent drawing
  • US11996820B2 patent drawing
  • US11996820B2 patent drawing

AI summary

A piezoelectric thin film suspended above a carrier substrate is adapted to propagate an acoustic wave in a Lamb mode excited by a component of an electric field that is oriented in a longitudinal direction along a length of the piezoelectric thin film. A first signal electrode is located on the piezoelectric thin film and oriented in a transverse direction perpendicular to the longitudinal direction. A first ground electrode is located on the piezoelectric thin film and oriented in the transverse direction. The first ground electrode is separated from the first signal electrode by a gap in which the acoustic wave resonates. A first release window and a second release window are located at a first end and a second end of the piezoelectric thin film, respectively. Intermittent release windows are located beyond distal ends of the first signal electrode and the first ground electrode.