Lamb Wave Resonator Engineered Border Region for Transverse Mode Suppression

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Solution Overview

Problem

Existing acoustic wave resonators face challenges in achieving high quality factor (Q) and suppressing transverse modes, particularly in Lamb wave resonators with piston mode structures.

Innovation Solution

The Lamb wave resonator incorporates a piezoelectric layer with an engineered region having a lower effective piezoelectric coefficient than the active region, combined with a piston mode structure and specific electrode designs, such as hammer head shapes, to suppress transverse modes and enhance quality factor (Q).

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-generated harmful factors

If a piston mode structure is used in Lamb wave resonators, then transverse modes can be suppressed, but the quality factor (Q) is reduced

Engineering Contradiction:
Improvetransverse modesVSAvoidquality factor
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The piezoelectric layer is engineered to have different effective piezoelectric coefficients in different regions: a lower coefficient in the border region and a higher coefficient in the active region. This spatial variation in material properties allows the border region to suppress transverse modes while the active region maintains high quality factor performance.

Inventive Principle:
Principle #3Local quality

2Ease of manufacture

If the piezoelectric layer has uniform properties, then manufacturing is simplified, but transverse modes cannot be effectively suppressed

Engineering Contradiction:
Improvepiezoelectric layer fabricationVSAvoidtransverse modes
Core Design Contradiction:
Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The piezoelectric layer is engineered to have different effective piezoelectric coefficients in different regions: a lower coefficient in the border region and a higher coefficient in the active region. This spatial variation in material properties allows the border region to suppress transverse modes while the active region maintains high quality factor performance.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The effective piezoelectric coefficient is deliberately varied across the piezoelectric layer by engineering the border region to have a lower coefficient than the active region. This parameter change enables selective suppression of transverse modes at the boundaries while preserving strong piezoelectric coupling in the active region for high Q operation.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The engineered region and electrode design effectively suppress transverse modes, allowing the resonator to operate in desired symmetric modes with improved electromechanical coupling and reduced spurious signals, enhancing performance and efficiency.

Implementation Method 1

The piezoelectric layer has an effective piezoelectric coefficient in the border region with a lower magnitude than an effective piezoelectric coefficient in the active region

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS20260081581A1Lamb wave resonator having piezoelectric layer with engineered region
Publication Date: 2026.03.19 SKYWORKS GLOBAL PTE LTD
  • US20260081581A1 patent drawing
  • US20260081581A1 patent drawing
  • US20260081581A1 patent drawing

AI summary

Aspects of this disclosure relate to a Lamb wave resonator with a piezoelectric layer that is less piezoelectric in a border region than in an active region. End portions of interdigital transducer electrode fingers of the Lamb wave resonator are in the border region. Related filters, multiplexers, radio frequency modules, radio frequency systems, wireless communication devices, and methods are also disclosed.