Lamella Alignment via Reconstructed Volume Radon Transform
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Solution Overview
Problem
Current techniques for forming lamella in charged particle microscopy are prone to errors, particularly in aligning structures parallel to the optical axis, leading to potential removal of desired structures during the lamella formation process, which requires skilled operators and is time-consuming.
Innovation Solution
The method involves forming a reconstructed volume of a sample using a dual beam system, performing mathematical transforms on planes over a range of angles to determine the optimal orientation of structures within the lamella, ensuring they are aligned parallel to the charged particle beam, and automatically adjusting the sample orientation for precise alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If manual lamella formation techniques are used, then structures can be imaged in TEM, but structures may be removed during lamella formation and highly skilled operators are required
Solution Approach 1:
The patent replaces manual mechanical alignment operations with an automated computational system. A controller performs mathematical transforms (Radon transform) on reconstructed volume data to automatically determine the optimal orientation of structures within the lamella, eliminating the need for highly skilled operators to manually align structures while improving consistency and reliability of structure retention
Solution Approach 2:
The patent creates a digital copy (reconstructed volume) of the sample's three-dimensional structure from multiple two-dimensional images. This virtual model allows the system to analyze and determine optimal orientation without physically manipulating the actual sample, enabling automated alignment decisions that preserve structures during lamella formation
2Manufacturing precision
If manual alignment techniques are used, then structures can be oriented, but the process is time-consuming and less precise
Solution Approach 1:
The patent replaces time-consuming manual alignment procedures with an automated computational system that performs mathematical transforms on reconstructed volume data. The controller automatically calculates the optimal orientation by analyzing the three-dimensional structure and determining the angle that aligns structures parallel to the optical axis, significantly reducing alignment time while improving precision
Solution Approach 2:
The patent performs preliminary reconstruction of the sample's three-dimensional structure from multiple two-dimensional images before the actual lamella formation. This advance preparation allows the system to pre-determine the optimal orientation, so that when lamella formation occurs, the alignment is already optimized, reducing both time and improving precision
Data Source
AI summary
Apparatuses and methods for aligning lamella to charged particle beams based on a volume reconstruction are disclosed herein. An example method at least includes forming a reconstructed volume of a portion of a sample, the sample including a plurality of structures, and the reconstructed volume including a portion of the plurality of structures, performing, over a range of angles, a mathematical transform on each plane of a plurality of planes of the reconstructed volume, and based on the mathematical transform on each plane of the plurality of planes, determining a target orientation of the sample within the range of angles, wherein the target orientation aligns the plurality of structures parallel to an optical axis of a charged particle beam.