Laminate With Segmented Polymer Lines For Vertical Block Copolymer Orientation

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Solution Overview

Problem

Existing methods for forming self-assembly patterns with block copolymers on substrates often result in non-linear patterns due to horizontal orientation, which hinders the formation of vertically oriented and linear structures essential for advanced nanotechnology applications.

Innovation Solution

A laminate structure is created using a substrate with alternating and repeatedly formed first and second polymer lines, where the first polymer line acts as a pinning layer and the second as a neutral layer, facilitating vertical orientation and linearity of the block copolymer self-assembled pattern through controlled polymerization and annealing processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If neutral surface preparation is applied to allow simultaneous wetting of different blocks, then orientation control is improved, but pattern linearity deteriorates due to horizontal orientation

Engineering Contradiction:
Improveorientation controlVSAvoidpattern linearity
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The substrate surface is segmented into two distinct layers: a pinning layer with high polarity that selectively binds one block, and a neutral layer with low polarity that provides horizontal support. This segmentation allows different regions of the substrate to perform different functions, enabling both orientation control and pattern linearity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the substrate are given different local properties: the pinning layer has high polarity for vertical orientation control, while the neutral layer has low polarity for maintaining linearity. This local differentiation resolves the contradiction by allowing each layer to optimize for its specific function

Inventive Principle:
Principle #3Local quality

2Ease of manufacture

If block copolymer self-assembly is performed on conventional substrates, then formation process is simplified, but vertical orientation and linearity are compromised

Engineering Contradiction:
Improveformation process simplicityVSAvoidvertical orientation and linearity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The substrate is pre-prepared with a specific two-layer structure (pinning layer and neutral layer) before block copolymer deposition. This preliminary action creates the necessary surface conditions to guide vertical orientation and maintain linearity during the self-assembly process, avoiding the need for complex post-processing

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The neutral layer acts as an intermediary between the pinning layer and the block copolymer. It provides a low-polarity interface that supports horizontal alignment while allowing the pinning layer to control vertical orientation, thus mediating between competing requirements

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the formation of vertically oriented and linear self-assembled block copolymer patterns on substrates, enhancing the linearity and orientation of nanostructures, thereby improving the efficiency and effectiveness in applications such as electronic devices and integrated circuits.

Implementation Method 1

a block copolymer can form a periodically arranged structure such as a sphere, a cylinder or a lamella by phase separation

Methodology Applied
Scientific EffectPhase separation:

Implementation Method 2

The shape and size of the domain of the structure formed by a self-assembly phenomenon of the block copolymer

Methodology Applied
Scientific EffectSelf-assembly: Self-Assembly

Implementation Method 3

a block having a larger polarity among the blocks of the block copolymer is wetted to the substrate, and a block having a smaller polarity is wetted at the interface with air

Methodology Applied
Scientific EffectWetting: Wetting

Data Source

PatentUS11530283B2Laminate
Publication Date: 2022.12.20 LG CHEM LTD
  • US11530283B2 patent drawing
  • US11530283B2 patent drawing
  • US11530283B2 patent drawing

AI summary

A laminate and a method for producing a patterned substrate using the same are disclosed herein. In some embodiments, a laminate includes a substrate, and a stripe pattern having first and second polymer lines alternately and repeatedly disposed on the substrate, wherein the first polymer line comprises a first polymer having a first polymerized unit having a ring structure connected to a main chain and a second polymerized unit represented by Formula 1. The method may be applied to manufacture of devices, such as electronic devices, or of applications, such as integrated optical systems, guidance and detection patterns of magnetic domain memories, flat panel displays, liquid crystal displays (LCDs), thin film magnetic heads or organic light emitting diodes, and may be used to build a pattern on a surface used in manufacture of discrete track media, such as integrated circuits, bit-patterned media and/or magnetic storage devices such as hard drives.