Laminated Organic Inorganic Semiconductor Device Yield
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Solution Overview
Problem
In solid-state imaging units, the reduction in pixel size leads to decreased sensitivity and signal-to-noise ratio due to reduced photon entry, and the use of color filters results in absorption issues and false colors, particularly with green and blue lights in red pixels, necessitating improved manufacturing methods for laminated organic and inorganic photoelectric conversion layers.
Innovation Solution
A semiconductor device and manufacturing method involving a laminated structure of an organic semiconductor layer, an inorganic film, and a protective film, where the inorganic film and protective film have peripheral edge portions formed outside the organic semiconductor layer's edge, preventing exposure and damage during processing, thus enhancing yield and reliability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the organic semiconductor layer is processed by photolithography method, then the inorganic film can be patterned, but the organic semiconductor layer is exposed to chemical solutions and damaged
Solution Approach 1:
The protective film is formed on the inorganic film before the photolithography processing is performed. This preliminary protective layer prevents the organic semiconductor layer from being exposed to chemical solutions during etching and washing steps, thereby resolving the contradiction between enabling inorganic film patterning and protecting the organic semiconductor layer integrity
Solution Approach 2:
The protective film acts as an intermediary layer between the inorganic film and the organic semiconductor layer. It allows the inorganic film to be processed while simultaneously protecting the organic semiconductor layer from direct contact with harmful chemical solutions, thus resolving the exposure and damage issue
2Productivity
If pixel size is reduced, then the number of pixels increases, but sensitivity and signal-to-noise ratio decrease
Solution Approach 1:
The patent uses a composite structure combining organic semiconductor layer and inorganic film in a laminated configuration. This composite material approach enables efficient photoelectric conversion in reduced pixel sizes while maintaining sensitivity, as the organic layer can be optimized for specific wavelength detection and the inorganic layer provides structural support and additional photoelectric conversion capability
Solution Approach 2:
The patent transitions from planar pixel arrangement to a three-dimensional laminated structure with organic and inorganic layers stacked vertically. This dimensional change allows increased pixel density in the horizontal plane while maintaining adequate photoelectric conversion volume through the vertical stacking, thus resolving the contradiction between pixel density and sensitivity
3Adaptability or versatility
If color filters are used for colorization, then color signals can be obtained, but green and blue lights are absorbed in red pixels causing false colors
Solution Approach 1:
The patent segments the photoelectric conversion function across multiple layers with different materials optimized for different wavelength ranges. The organic semiconductor layer and inorganic film are segmented to detect specific colors (red, green, blue) independently, eliminating the need for color filters that cause cross-absorption and false colors, thus resolving the contradiction between color detection capability and color accuracy
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the yield and reliability of the laminated structure by preventing damage to the organic semiconductor layer during processing, maintaining sensitivity and reducing false colors by allowing for efficient photoelectric conversion of multiple colors without color filters.
Implementation Method 1
an organic photoelectric conversion section that detects green light and generates a signal electric charge in correspondence therewith
Implementation Method 2
photodiodes (inorganic photoelectric conversion sections) that detect respective red and blue light
Data Source
AI summary
A semiconductor device includes, in order on a substrate, an organic semiconductor layer, an inorganic film, and a protective film. The inorganic film and the protective film each have a peripheral edge portion that is formed in an outer region compared to a peripheral edge portion of the organic semiconductor layer.