RTP Lamp Adapter Segmentation for Replaceable Bulb

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Solution Overview

Problem

Current lamp assembly designs in rapid thermal processing (RTP) chambers require replacement of the entire lamp assembly, including a functional base, when the bulb fails, leading to unnecessary waste and expense, as the base is not separately replaceable.

Innovation Solution

An improved adapter design allows for the lamp element to be removably engaged with the adapter, enabling individual replacement of the lamp element and adapter, with optional fuse replacement from the side or bottom, and featuring thermal conductive materials and a cooling path to manage heat transfer effectively.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the entire lamp assembly is replaced when the bulb fails, then the faulty bulb is replaced, but the functional base is also discarded causing waste and expense

Engineering Contradiction:
Improvelamp functionalityVSAvoidfunctional base
Core Design Contradiction:
ReliabilityVSLoss of substance

Solution Approach 1:

The lamp assembly is divided into separable components: the lamp element (bulb) and the base coupling are made into independent replaceable parts. The lamp element can be detached from the base through the adapter interface, allowing only the faulty lamp element to be replaced while retaining the functional base assembly.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The lamp element is extracted as a separate replaceable component from the base assembly. The adapter mechanism enables the lamp element to be removed and replaced independently without disturbing the base, which contains the functional electrical and mechanical coupling components.

Inventive Principle:
Principle #2Taking out (Extraction)

2Ease of manufacture

If the lamp assembly is designed as a single integrated unit, then manufacturing is simplified, but replacement requires discarding functional components

Engineering Contradiction:
Improvelamp assembly productionVSAvoidlamp element replacement
Core Design Contradiction:
Ease of manufactureVSEase of repair

Solution Approach 1:

The lamp assembly is segmented into modular components (lamp element, adapter, base) that can be manufactured separately and assembled. This segmentation enables both easy manufacturing of individual components and easy replacement of only the faulty lamp element while preserving the base and adapter.

Inventive Principle:
Principle #1Segmentation

3Use of energy by moving object

If the adapter temperature is not controlled, then heat transfer is maximized, but the adapter and press seal are damaged reducing bulb life

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoidbulb life
Core Design Contradiction:
Use of energy by moving objectVSDuration of action of stationary object

Solution Approach 1:

The adapter acts as a thermal intermediary between the hot lamp element and the base assembly. It incorporates thermal management features including cooling channels and thermally conductive materials that efficiently transfer heat away from the press seal and adapter body, maintaining temperatures below damage thresholds while preserving bulb life.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The adapter controls temperature parameters through integrated cooling mechanisms, maintaining the adapter and press seal temperatures below 350°C. This temperature control is achieved through thermal conduction pathways and cooling fluid flow that dynamically adjust heat dissipation to protect components while allowing efficient heat transfer from the lamp element.

Inventive Principle:
Principle #35Parameter changes

4Stability of the object's composition

If the lamp element is permanently attached to the base, then structural stability is improved, but height adjustment and replacement flexibility are lost

Engineering Contradiction:
Improvelamp assembly stabilityVSAvoidheight adjustment
Core Design Contradiction:
Stability of the object's compositionVSAdaptability or versatility

Solution Approach 1:

The adapter provides a dynamic, reversible connection between the lamp element and base. The press seal creates a removable engagement that offers stable operation during use but allows easy detachment for replacement or height adjustment. This dynamic interface enables the system to switch between stable operation and flexible reconfiguration as needed.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design reduces replacement costs by allowing only the faulty lamp element to be replaced, extends bulb life by maintaining the adapter's temperature below 350°C, and facilitates controlled thermal radiation through contoured receptacles and coatings.

Implementation Method 1

the seal portion encapsulates and creates a hermetic seal about a metal foil connected to a filament of the lamp element

Methodology Applied
Scientific EffectHermetic seal:

Implementation Method 2

featuring thermal conductive materials and a cooling path to manage heat transfer effectively

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 3

During RTP of substrates, thermal radiation is generally used to rapidly heat a substrate in a controlled environment to a maximum temperature of up to about 1350° C

Methodology Applied
Scientific EffectThermal radiation: Thermal Radiation

Data Source

PatentUS10319579B2Adapter for replaceable lamp
Publication Date: 2019.06.11 APPLIED MATERIALS INC
  • US10319579B2 patent drawing
  • US10319579B2 patent drawing
  • US10319579B2 patent drawing

AI summary

Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal coupling to the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.