Lamp Cross-Section Minimizes Coil Heating

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Solution Overview

Problem

In semiconductor and thin film fabrication, lamps used to provide thermal energy often experience premature failure due to coil heating caused by self-absorption of reflected radiant energy, which reduces the efficiency and lifespan of the lamps.

Innovation Solution

The use of a tubular body made from transparent materials with a reflective coating on a portion of the lamp tube, configured to minimize the reflection of electromagnetic radiation back to the filament, such as a parabolic or cardioid-shaped lower portion with a reflective coating, reduces self-absorption and coil heating.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If a reflective coating is applied to the lamp tube to direct radiant energy, then the thermal energy delivery to the substrate is improved, but the reflected energy is absorbed by the coil causing coil heating and premature lamp failure

Engineering Contradiction:

Improvethermal energy deliveryVSAvoidlamp lifespan

Core Design Contradiction:

PowerVSReliability

Solution Approach 1:

The patent applies this principle by taking the harmful reflected radiant energy that would otherwise be absorbed by the coil and redirecting it through the transparent lamp tube to the substrate. The reflective coating is strategically positioned and shaped to bounce stray radiation away from the coil while allowing it to pass through the transparent tube to heat the substrate, thus converting a harmful effect into a beneficial one.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The transparent lamp tube acts as an intermediary element between the reflective coating and the coil. The reflective coating directs radiation toward the transparent tube, which then transmits the radiation to the substrate while preventing the radiation from reaching and heating the coil. This intermediary structure resolves the contradiction by decoupling the reflection function from the coil heating problem.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Productivity

If reflected radiant energy is directed toward the substrate, then thermal processing efficiency is improved, but coil temperature increases leading to premature failure

Engineering Contradiction:

Improvethermal processing efficiencyVSAvoidcoil temperature

Core Design Contradiction:

ProductivityVSTemperature

Solution Approach 1:

The patent converts the harmful effect of reflected radiation heating the coil into a beneficial effect by using the transparent tube to redirect this same reflected radiation onto the substrate. The reflective coating captures stray radiation and the transparent tube serves as a window that blocks the radiation from reaching the coil while allowing it to heat the substrate, thus improving thermal processing efficiency without increasing coil temperature.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Use of energy by moving object

If a reflective coating is used to enhance radiant energy direction, then energy utilization is improved, but self-absorbed energy increases causing coil heating

Engineering Contradiction:

Improveenergy utilizationVSAvoidself-absorbed energy

Core Design Contradiction:

Use of energy by moving objectVSLoss of energy

Solution Approach 1:

The transparent lamp tube serves as an intermediary that separates the energy reflection function from the coil. The reflective coating directs radiation onto the transparent tube, which then transmits the energy to the substrate while preventing self-absorption by the coil. This intermediary structure allows high energy utilization without the penalty of self-absorbed energy heating the coil.

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively minimizes the reflection of radiant energy back to the filament, reducing coil heating and extending the lifespan of the lamps while maintaining thermal energy efficiency for substrate processing systems.

Implementation Method 1

a reflective coating disposed on a portion of the tubular body to form a reflective portion, wherein the reflective portion is configured to minimize reflection of electromagnetic radiation emanating from the filament during use back to the filament

Methodology Applied

Scientific EffectReflection: Reflection

Implementation Method 2

a tubular body formed from a material transparent to electromagnetic radiation

Methodology Applied

Scientific EffectTransparency to electromagnetic radiation:

Implementation Method 3

a filament disposed within the tubular body

Methodology Applied

Scientific EffectElectromagnetic radiation emission:

Data Source

PatentUS11462396B2Lamp cross-section for reduced coil heating

Publication Date: 2022.10.04 APPLIED MATERIALS INC

AI summary

Embodiments of apparatus for providing radiant energy in the form of electromagnetic radiation are provided herein. In some embodiments a radiation source for electromagnetic radiation includes a tubular body formed from a material transparent to electromagnetic radiation; a filament disposed within the tubular body; and a reflective coating disposed on a portion of the tubular body to form a reflective portion, wherein the reflective portion is configured to minimize reflection of electromagnetic radiation emanating from the filament during use back to the filament.