Lamp Driver Series DC/DC Converters for Low Pressure Arcing
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Solution Overview
Problem
Rapid thermal processing (RTP) systems face challenges with arcing between lamps and the lamphead assembly due to low breakdown voltage of pressure controlling gases at reduced pressures, which is exacerbated by conventional lamp drivers providing high electrical potential.
Innovation Solution
The proposed solution involves a lamp driver design with at least two DC/DC converters connected in series, reducing the electrical potential between the lamps and the grounded lamphead assembly by attaching a line to a reference voltage, thereby lowering the risk of arcing. This design includes a power source, DC/DC converters, and a direct connection to a reference voltage, which converts 480 V AC to a reduced DC voltage of about 100 V, minimizing the electrical potential.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional lamp drivers are used to power lamps in a reduced pressure environment, then the lamps can be positioned closer to the substrate for efficient heating, but the low breakdown voltage of pressure controlling gases increases the risk of arcing between the lamps and lamphead assembly
Solution Approach 1:
The patent changes the electrical potential parameter from high voltage (conventional lamp drivers) to low voltage (maximum 100V) operation. This parameter change allows the system to maintain heating efficiency while eliminating the arcing risk associated with high voltage at reduced pressures, directly resolving the technical contradiction between heating efficiency and arcing risk
Solution Approach 2:
The patent applies equipotentiality by grounding the lamphead assembly and maintaining the lamps at a low electrical potential (maximum 100V) relative to ground. This creates an equipotential environment that prevents charge accumulation and eliminates the conditions necessary for arcing, while still allowing efficient thermal coupling between the lamps and substrate
2Power
If high electrical potential is applied to the lamps for effective heating, then the heating performance is improved, but the risk of arcing between lamps and lamphead assembly increases due to low breakdown voltage at reduced pressure
Solution Approach 1:
The patent changes the voltage parameter from high to low (maximum 100V) while maintaining adequate heating power through optimized current control. This parameter transformation eliminates the harmful arcing effect that occurs at high voltages in reduced pressure environments, directly addressing the contradiction between heating power and arcing prevention
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The reduced electrical potential between the lamps and the lamphead assembly significantly lowers the risk of arcing, allowing for closer proximity without arcing incidents, enhancing the safety and efficiency of the thermal processing chamber.
Implementation Method 1
at least two DC/DC converters, each DC/DC converter connected with the power source in series... converting 480 V AC to a reduced DC voltage of about 100 V
Data Source
AI summary
Embodiments of the present disclosure relate to a lamp driver for lamps used as a source of heat radiation in a thermal processing chamber. The lamp driver includes a power source, at least two DC/DC converters, each DC/DC converter connected with the power source in series, a direct connection between the at least two DC/DC converters, and a line that is attached to the direct connection and attachable to a reference voltage. A plurality of the lamp drivers may be utilized to power a plurality of lamps positioned in a grounded lamphead assembly. The electrical potential between the lamps and the grounded lamphead assembly is reduced, which reduces the risk of arcing between the lamps and the lamphead assembly.