Lamp Failure Detection in Rapid Thermal Processing Arrays
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Solution Overview
Problem
Existing lamp failure detection systems in rapid thermal processing (RTP) systems are inadequate as they cannot independently identify which lamp has failed, cannot detect different types of failures such as partial shorts, and are susceptible to electromagnetic noise, leading to inaccurate results and increased downtime.
Innovation Solution
A lamp failure detection system that uses a data acquisition module to sample voltage signals along the circuit path of serially connected lamps, allowing a controller to determine lamp failures based on voltage drops across individual lamps, thereby identifying which lamp has failed and the type of failure, and is designed to operate independently of voltage and current waveforms.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If existing lamp failure detection systems are used, then the system can detect lamp failures, but it cannot independently identify which lamp has failed and cannot detect different types of failures
Solution Approach 1:
The lamp array is divided into multiple series-connected groups, with each group having its own dedicated voltage sampling circuit. This segmentation allows independent monitoring of each lamp group, enabling identification of specific failed lamps and failure types without interference from other lamps.
Solution Approach 2:
A microcontroller unit serves as an intermediary between the voltage sampling circuits and the control system. The microcontroller processes voltage differential signals, compares them against reference values, and determines both the location and type of lamp failure, providing comprehensive failure information.
2Reliability
If existing lamp failure detection systems are used, then lamp failures can be detected, but the system is susceptible to electromagnetic noise leading to inaccurate results
Solution Approach 1:
The detection system extracts only the voltage differential signal across each lamp group from the complex electromagnetic environment. By focusing solely on the voltage difference between two points in each series group and using shielded wiring, the system eliminates susceptibility to electromagnetic noise while maintaining reliable failure detection.
3Productivity
If lamp failures are not accurately identified, then the system operates continuously, but adverse effects on wafer processing occur
Solution Approach 1:
The system performs preliminary detection of lamp failures before they affect wafer processing quality. By continuously monitoring voltage differentials and identifying failures immediately, the system can alert operators or automatically adjust lighting before temperature uniformity deteriorates, maintaining both productivity and processing quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides accurate and reliable lamp failure detection, reducing system downtime by identifying specific lamp failures and preventing adverse effects on wafer processing, while being immune to electromagnetic interference.
Implementation Method 1
a data acquisition (DAQ) module to sample voltage signals at different sampling locations along a circuit path formed by a group of serially connected lamps in the array
Data Source
AI summary
An apparatus and method for detecting lamp failure is described for an array of lamps used in a rapid thermal processing system. The lamp failure detection system enables identification of a failed lamp among a plurality of lamps, and also provides identification of the failure type. The apparatus applies a lamp failure detection method to the voltage drop values measured across each lamp to determine if a lamp is in a failure state. In one embodiment, a field programmable gate array is used to apply a failure detection method to the lamp voltage values.