Lamphead Power Distribution Assembly for Selective Lamp Replacement
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Solution Overview
Problem
Conventional lamphead systems in thermal processing chambers require extensive effort and time for lamp replacement due to their design, leading to slower process throughput and compromised heating temperature profiles, as they cannot accurately detect which lamp in a pair has failed, necessitating the replacement of both lamps.
Innovation Solution
An improved power distribution assembly with openings for easy lamp replacement and a voltage data acquisition module to detect lamp failures by measuring voltage drops across lamps, allowing for the identification of faulty lamps and facilitating quick replacement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the entire lamphead is manually dropped to replace a faulty lamp, then the lamp can be accessed for replacement, but the process time increases and throughput decreases
Solution Approach 1:
The lamphead assembly is divided into modular sections with individual lamp receptacles that can be accessed independently. The power distribution assembly is segmented to allow individual lamp replacement without moving the entire lamphead, enabling technicians to replace only the faulty lamp while maintaining other lamps in operation.
Solution Approach 2:
The faulty lamp is extracted from the lamphead assembly through accessible receptacles without requiring removal of the entire lamphead. The power distribution assembly allows individual lamp extraction and replacement, separating the replacement operation from the complete lamphead assembly.
2Stability of the object's composition
If both lamps in a pair are replaced when one fails, then uniformity is maintained, but unnecessary replacement effort and time are consumed
Solution Approach 1:
The system incorporates individual lamp failure detection that provides feedback on the specific status of each lamp. This feedback mechanism identifies which lamp has failed, enabling selective replacement of only the faulty lamp rather than replacing both lamps in a pair, thus maintaining heating uniformity while reducing unnecessary replacement operations.
Solution Approach 2:
The mechanical approach of replacing both lamps in a pair is substituted with an electrical detection system that identifies individual lamp failures. This substitution allows for precise identification and selective replacement based on actual failure conditions rather than following a fixed mechanical replacement pattern.
3Stability of the object's composition
If lamps are located at distance apart in the lamphead, then radiation uniformity is maintained, but lamp replacement becomes more difficult and time-consuming
Solution Approach 1:
The lamphead assembly is segmented into independently accessible receptacles, allowing lamps to be spatially distributed for radiation uniformity while maintaining easy access to each individual lamp. The modular receptacle design enables technicians to reach and replace lamps at their specific locations without disassembling the entire lamphead structure.
4Use of energy by moving object
If conventional current measurement is used for lamp pairs, then power consumption is monitored, but individual lamp failure detection is impossible
Solution Approach 1:
The conventional current measurement system is substituted with a voltage-based detection system that measures voltage drops across individual lamps. This substitution enables precise identification of individual lamp failures by detecting abnormal voltage patterns, replacing the inadequate current measurement approach that could only monitor overall power consumption.
Solution Approach 2:
The detection parameter is changed from current measurement to voltage drop measurement across individual lamps. This parameter change enables the system to identify individual lamp failures by detecting voltage anomalies, providing the precision needed for selective lamp replacement while maintaining power monitoring capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables fast and efficient lamp replacement, reduces downtime, and maintains uniform heating profiles by accurately detecting and addressing individual lamp failures within the lamphead assembly.
Implementation Method 1
heat radiation from the lamps radiate through the lower dome onto a rotating substrate positioned on the substrate support
Implementation Method 2
a voltage data acquisition (DAQ) module configured to sample voltage signals at different sampling locations along a circuit path formed by a group of serially connected lamps
Data Source
AI summary
Embodiments described herein generally relate to an improved power distribution assembly for a lamphead assembly used in a thermal processing chamber. In one embodiment, the lamphead assembly includes a plurality of lamps for thermal processing of semiconductor substrates, and a power distribution assembly having a plurality of openings, the power distribution assembly provides power to the plurality of lamps, and each opening is sized to allow passage of the lamp therethough.