Lanthanum Oxide Sputtering Target for Insulating Film Stability
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Solution Overview
Problem
The development of a sputtering target for forming insulating oxide films with high dielectric constants and excellent insulating properties is hindered by lanthanum oxide's moisture absorption, leading to powder formation and reduced target stability, which affects the quality and longevity of the sputtering process.
Innovation Solution
A sintered body comprising lanthanum oxide combined with beryllium, magnesium, calcium, or barium oxides, with lanthanum having the highest molar ratio, is used to create a sputtering target that prevents powder formation and maintains high dielectric and insulating properties, while also incorporating additional oxides like aluminum, titanium, or zirconium to enhance stability and voltage resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If lanthanum oxide is used as a sputtering target material to achieve high dielectric constant and excellent insulating properties, then the insulating oxide film quality is improved, but moisture absorption occurs leading to powder formation and reduced target stability
Solution Approach 1:
The patent applies composite materials by combining lanthanum oxide with at least one oxide selected from beryllium oxide, magnesium oxide, calcium oxide, strontium oxide, or barium oxide. This composite structure maintains the high dielectric constant and insulating properties of lanthanum oxide while the additional oxides prevent moisture absorption and powder formation, thereby resolving the contradiction between reliability and stability.
2Manufacturing precision
If lanthanum oxide is used to form insulating oxide films with high dielectric constants, then the film quality is improved, but powder formation occurs reducing target lifespan
Solution Approach 1:
The composite sputtering target combines lanthanum oxide with stabilizing oxides (beryllium oxide, magnesium oxide, calcium oxide, strontium oxide, or barium oxide). This composition maintains the high dielectric constant and excellent insulating properties necessary for film quality while preventing powder formation through the moisture-resistant characteristics of the composite material, thereby extending target lifespan.
3Stability of the object's composition
If lanthanum oxide absorbs moisture then powder formation occurs, but preventing moisture absorption is needed to maintain target stability
Solution Approach 1:
The patent converts the harmful moisture absorption property of lanthanum oxide into a beneficial feature by combining it with oxides that have complementary properties. The composite structure utilizes the high dielectric constant of lanthanum oxide while the accompanying oxides (beryllium oxide, magnesium oxide, calcium oxide, strontium oxide, or barium oxide) provide moisture resistance, transforming the harmful moisture absorption into a stable, powder-free composite material suitable for sputtering applications.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The resulting sputtering target effectively forms insulating oxide films with high dielectric constants and excellent insulating properties, preventing moisture absorption and extending the target's lifespan, thereby enabling efficient and stable film deposition for field-effect transistors.
Implementation Method 1
a sputtering target for an insulating oxide film includes a sintered body including a lanthanum oxide and at least one selected from the group consisting of a beryllium oxide, a magnesium oxide, a calcium oxide, a strontium oxide, and a barium oxide
Data Source
AI summary
A sputtering target for an insulating oxide film, the sputtering target including a sintered body including a lanthanum oxide and at least one selected from the group consisting of a beryllium oxide, a magnesium oxide, a calcium oxide, a strontium oxide, and a barium oxide, wherein lanthanum has highest molar ratio among elements other than oxygen contained in the sintered body.