Large Pellicle Adhesive Layer for Clean Solvent-Free Removal
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Solution Overview
Problem
Conventional large pellicle systems face difficulties in removing the pellicle from an exposure master plate without using solvents, often resulting in cohesive failure of the pressure-sensitive adhesive, leading to contamination and potential damage to the exposure master plate.
Innovation Solution
A large pellicle with a quadrilateral or circular pellicle frame and a pressure-sensitive adhesion layer on its lower end face, featuring a cohesive breaking strength of 20 g/mm² or greater, allowing for easy peeling without adhesive residue and minimizing contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a pressure-sensitive adhesive layer is used to affix the pellicle to the exposure master plate, then the pellicle can be easily attached and removed, but the adhesive layer undergoes cohesive failure during peeling, causing contamination and damage to the exposure master plate
Solution Approach 1:
The patent changes the physical parameters of the pressure-sensitive adhesive layer by increasing its thickness to 400 μm or more and controlling its cohesive breaking strength to be 20 g/mm² or greater. These parameter changes enable the adhesive layer to withstand peeling forces without cohesive failure, resolving the contradiction between ease of removal and adhesive integrity.
2Productivity
If the pellicle is removed from the exposure master plate, then it can be reused or replaced, but adhesive residue remains on the plate, causing contamination and requiring additional cleaning steps
Solution Approach 1:
By increasing the thickness and cohesive breaking strength of the pressure-sensitive adhesive layer, the patent ensures that the adhesive fails adhesively at the pellicle frame interface rather than cohesively within the adhesive layer itself. This parameter change eliminates adhesive residue on the exposure master plate, allowing immediate reuse without cleaning.
3Device complexity
If a thin pressure-sensitive adhesive layer is used, then the pellicle attachment is simple, but the adhesive layer is prone to cohesive failure and contamination during removal
Solution Approach 1:
The patent resolves this contradiction by changing the thickness parameter from conventional thin layers to 400 μm or more. This increased thickness, combined with controlled cohesive breaking strength, provides sufficient mechanical integrity during attachment and removal while maintaining the simplicity of the single-layer adhesive structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient removal of the pellicle from the exposure master plate without solvent use, preventing adhesive residue and contamination, and ensuring the plate's integrity.
Implementation Method 1
a pressure-sensitive adhesion layer for affixing an exposure master plate to the pellicle frame, the pressure-sensitive adhesion layer being provided on the lower end face of the pellicle frame
Data Source
AI summary
A pellicle is provided that comprises a pellicle frame that has an upper end face and a lower end face and is a quadrilateral having a side greater than 30 cm or a circle having a diameter of greater than 30 cm, a pellicle film stretched over the upper end face of the pellicle frame, and a pressure-sensitive adhesion layer for affixing an exposure master plate to the pellicle frame, the pressure-sensitive adhesion layer being provided on the lower end face of the pellicle frame, the pressure-sensitive adhesion layer having a thickness of 400 μm or greater, and the pressure-sensitive adhesion layer having a level of cohesive breaking strength such that the pressure-sensitive adhesion layer does not undergo cohesive failure when peeled off from the pellicle frame or the exposure master plate.