Laser Ablation Spectroscopy Plasma Stabilization

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Solution Overview

Problem

Laser-induced breakdown spectroscopy (LIBS) methods for monitoring substrate composition are unreliable due to inconsistent plasma plumes created by pulse lasers, leading to variations in recorded data and failure to match known standards.

Innovation Solution

A laser ablation spectroscopy apparatus that uses a pulsed laser to generate a plasma plume, detected by an optical spectrometer with an intensified charge-coupled device, and a system computer for synchronizing stage movement in three dimensions, allowing for automatic adjustment of the sample height and averaging spectral data from multiple ablation sites.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If laser-induced breakdown spectroscopy (LIBS) is used to monitor substrate composition, then analysis speed and economy are improved, but measurement reliability deteriorates due to inconsistent plasma plumes

Engineering Contradiction:
Improveanalysis speedVSAvoidmeasurement reliability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent divides the analysis into multiple discrete laser pulses (e.g., 3-10 pulses per measurement point) rather than relying on a single pulse. Each pulse generates spectral data that is then averaged, segmenting the measurement process to reduce the impact of plasma plume variability on overall measurement reliability while maintaining fast analysis speed.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent employs periodic laser pulsing with controlled intervals between pulses. This periodic action allows the plasma plume to stabilize between pulses while maintaining a consistent analysis rhythm, improving measurement reliability without sacrificing the rapid throughput that makes LIBS productive.

Inventive Principle:
Principle #19Periodic action

2Measurement precision

If multiple laser ablation sites are analyzed and data is averaged, then measurement precision is improved, but analysis time increases

Engineering Contradiction:
Improvedata accuracyVSAvoidanalysis time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies partial averaging by analyzing a limited number of ablation sites (e.g., 3-10 sites) rather than exhaustive sampling. This partial action provides sufficient precision improvement to overcome plasma variability while limiting the time penalty, representing an optimized balance between precision and speed.

Inventive Principle:
Principle #16Partial or excessive action

Solution Approach 2:

The system performs preliminary automated positioning and focusing on multiple ablation sites before the actual spectral analysis. This preliminary action ensures that when measurements are taken, they are quickly acquired with optimal conditions already established, reducing the time penalty associated with analyzing multiple sites.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If automated stage movement and synchronization are implemented, then manufacturing precision is improved, but device complexity increases

Engineering Contradiction:
Improvepositioning accuracyVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent employs a multi-functional control system that simultaneously manages stage positioning, laser pulse timing, spectrometer gating, and data acquisition. This universal controller handles multiple functions through a single integrated system, achieving high positioning precision while limiting the increase in overall device complexity through functional consolidation.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The system implements feedback mechanisms where the controller continuously monitors stage position and adjusts movement in real-time to maintain precise positioning during automated analysis of multiple ablation sites. This feedback loop ensures manufacturing precision without requiring overly complex mechanical systems.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach provides reliable and accurate elemental composition analysis by stabilizing the plasma plume and averaging data, reducing variations and improving matching with known standards.

Implementation Method 1

A pulsed laser is focused on a sample site to generate a plasma plume during a laser ablation process

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 2

The plasma plume can be detected with an optical spectrometer having an intensified charge coupled device

Methodology Applied
Scientific EffectOptical emission spectroscopy: Absorption Spectroscopy

Implementation Method 3

an optical spectrometer having an intensified charge coupled device

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 4

A change in the height of the sample is detected using a sensor. Preferably, the sensor is a triangulation sensor

Methodology Applied
Scientific EffectTriangulation: Parallax

Data Source

PatentUS10393587B1Methods for laser ablation analysis
Publication Date: 2019.08.27 APPLIED SPECTRA INC
  • US10393587B1 patent drawing
  • US10393587B1 patent drawing
  • US10393587B1 patent drawing

AI summary

Methods for laser induced ablation spectroscopy are disclosed. A sample site position sensor, and stage position motors can move the stage in three independent spatial coordinate directions, and a stage position control circuit is used to move an analysis sample site to selected coordinate positions for laser ablation. Light emitted from a plasma plume produced with laser ablation can be gathered into a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a broadband spectrometer operable to analyze a relatively wide spectral segment, and a different branch can convey a second portion of the light to a high dispersion spectrometer operable to measure minor concentrations and/or trace elements. Emissions from a plasma plume can be simultaneously analyzed in various ways using a plurality of spectrometers having distinct and/or complementary capabilities.