Backing Plate-Free Laser Ablation Target for Superconducting Films
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Solution Overview
Problem
The existing laser ablation methods for producing oxide superconducting thin films face challenges with productivity and cost due to the need for bonding the oxide superconducting sintered body to a backing plate, which limits the use of the target to one side and increases production costs, and the target is prone to breaking under thermal stress without a backing plate.
Innovation Solution
A laser ablation target is developed using an RE-based oxide superconducting sintered body with a specific composition and structure, allowing it to be used without a backing plate by controlling the ratio of oxide superconductor crystal grains and precipitated phases to enhance strength against thermal stress, achieved through a manufacturing process involving calcination, compression molding, and controlled oxygen partial pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the oxide superconducting sintered body is bonded to a backing plate, then the target has strength against breakage and can be used in sputtering method, but lots of man-hours are required for bonding work, material cost is high, and only one side of the target can be used
Solution Approach 1:
The invention removes the backing plate from the target structure, extracting the problematic component that caused bonding work and associated costs. The oxide superconducting sintered body is designed to function as a standalone target without requiring attachment to a backing plate, thereby eliminating all bonding-related productivity losses and material costs.
Solution Approach 2:
The target is designed to be usable on both sides for laser ablation, providing multi-functionality. Unlike conventional targets that can only be used on one side due to backing plate attachment, this invention allows both surfaces of the oxide superconducting sintered body to serve as active target surfaces, effectively doubling the utility of each target.
2Temperature
If the oxide superconducting sintered body is bonded to a backing plate, then heat can be efficiently released, but material cost is high due to backing plate manufacturing cost and bonding processing cost
Solution Approach 1:
The invention removes the backing plate component entirely, eliminating the associated manufacturing costs and bonding processing costs. The oxide superconducting sintered body is engineered to manage thermal loads independently through its intrinsic thermal properties and structural design.
Solution Approach 2:
The invention changes the thermal management approach by modifying the target's internal structure and material composition to inherently handle heat dissipation. The oxide superconducting sintered body is designed with specific compositional parameters that enable effective thermal conduction and stress management without requiring external backing plate support.
3Productivity
If the oxide superconducting sintered body is used without bonding to backing plate, then productivity is improved and cost is reduced, but the target is broken to pieces due to heat strain stress when directly irradiated with laser beams
Solution Approach 1:
The invention modifies the compositional parameters of the oxide superconducting sintered body, specifically adjusting the ratio of oxide superconductor crystal grains to precipitated phases. This parameter change enhances the material's intrinsic mechanical strength and thermal stress resistance, allowing it to withstand laser ablation conditions without requiring a backing plate.
Solution Approach 2:
The target utilizes a composite microstructure consisting of oxide superconductor crystal grains embedded in a precipitated phase matrix. This composite structure provides both the superconducting functionality and the mechanical strength needed to resist thermal stress during laser ablation, eliminating the need for a backing plate while maintaining reliability.
4Adaptability or versatility
If the oxide superconducting sintered body is used without bonding to backing plate, then only one side usage limitation is removed, but the target is broken to pieces due to heat strain stress
Solution Approach 1:
The invention adjusts the compositional parameters of the oxide superconducting sintered body, specifically the ratio of oxide superconductor crystal grains to precipitated phases, to enhance mechanical strength and thermal stress resistance. This parameter optimization enables the target to withstand laser ablation conditions while allowing usage on both sides.
Solution Approach 2:
The target employs a composite microstructure with oxide superconductor crystal grains in a precipitated phase matrix, providing both superconducting performance and mechanical robustness. This composite structure enables bidirectional usage by providing the necessary strength to resist thermal stress without requiring a backing plate.
Data Source
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AI summary
To provide an RE-based oxide superconducting sintered body that can be used as a target applicable to a laser ablation method without bonding it to a backing plate, and a manufacturing method of the same. Each kind of powder or solution is prepared, and when a composition formula of an RE-based oxide superconductor is expressed by REaBabCucOx, raw materials are weighed and mixed so as to satisfy a + b + c = 6, 0.95 < a < 1.05 and 1.505 = c / b < 1.6, and thereafter calcinations, pulverization, sintering, pulverization, and molding are carried out to obtain the RE-based oxide superconducting sintered body, and this RE-based oxide superconducting sintered body is used as a laser ablation target.