Laser Processing Alignment Using Integrated Beam Reception Measurement

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Solution Overview

Problem

Existing processing systems face challenges in improving convenience and performance when processing objects with laser light, particularly in accurately positioning and measuring components involved in the processing system.

Innovation Solution

A processing system is designed with an irradiation optical system, object placing apparatus, light receiving apparatus, measurement apparatus, movement apparatus, and control apparatus to precisely control the positioning and measurement of objects during laser processing, utilizing first and second information to optimize the alignment and measurement of the light receiving and measurement apparatuses.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the light receiving apparatus and measurement apparatus are positioned independently, then each apparatus can perform its function, but the positioning accuracy and alignment between apparatuses deteriorates

Engineering Contradiction:
Improvepositioning accuracyVSAvoidsystem complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines the light receiving apparatus and measurement apparatus into a single integrated apparatus. The light receiving unit and measurement unit share common components including the object placing apparatus, movement apparatus, and control apparatus. This integration ensures that both functions operate from a unified positioning基准, eliminating alignment errors that would occur with independent apparatuses, while avoiding the complexity of coordinating multiple separate systems.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated apparatus serves multiple functions: it can optically receive the energy beam for processing monitoring and measure the position of the light receiving apparatus or related parts. The movement apparatus can position the integrated apparatus for both optical reception and measurement tasks, and the control apparatus manages both functions through unified control, achieving multi-functionality without requiring separate dedicated apparatuses for each function.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Measurement precision

If the object placing apparatus is moved frequently for measurement, then measurement accuracy improves, but processing efficiency deteriorates

Engineering Contradiction:
Improvemeasurement accuracyVSAvoidprocessing efficiency
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The control apparatus pre-calculates and stores the positional relationship between the irradiation position and measurement position based on first information (position during irradiation) and second information (position during measurement). This preliminary establishment of the positional relationship allows the system to quickly determine measurement positions without frequent physical movement of the object placing apparatus, thereby maintaining measurement accuracy while improving processing efficiency.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent replaces frequent mechanical movement of the object placing apparatus with computational methods. The control apparatus uses the stored positional relationship information to calculate and determine the appropriate measurement positions, substituting physical repositioning operations with information processing operations. This reduces mechanical movement while maintaining the ability to achieve accurate measurements.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances the accuracy and efficiency of laser processing by ensuring precise alignment and measurement of the light receiving and measurement apparatuses, thereby improving the overall performance and convenience of the processing system.

Implementation Method 1

a light receiving apparatus that is disposed at the object placing apparatus and that optically receives the energy beam from the irradiation optical system

Methodology Applied
Scientific EffectOptical reception: Photoelectric Effect

Data Source

PatentUS20250339920A1Processing system and processing method
Publication Date: 2025.11.06 NIKON CORP
  • US20250339920A1 patent drawing
  • US20250339920A1 patent drawing
  • US20250339920A1 patent drawing

AI summary

A processing system has: an irradiation optical system irradiating an object with an energy beam from a light source; an object placing apparatus on which the object is placed; a light receiving apparatus that is disposed at the object placing apparatus and that optically receives the energy beam from the irradiation optical system; and a measurement apparatus that measures at least one of the light receiving apparatus and a part that is related to the light receiving apparatus. The processing system moves the object placing apparatus to a position at which the light receiving apparatus optically receives the energy beam and moves the object placing apparatus to a position at which the measurement apparatus measures a position of the light receiving apparatus.