Laser Alignment Unit for Probe Exchange Automation
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Solution Overview
Problem
As semiconductor chip sizes decrease and internal structures become more complex, existing probe measurement devices face challenges in accurately and efficiently exchanging probes, leading to potential measurement inaccuracies and increased complexity.
Innovation Solution
An apparatus and method utilizing a stacker, probe connector, and laser alignment unit with a light emitter and receiver to align and secure probes, allowing for precise alignment and efficient exchange by moving the stage in multiple directions and using camera images for alignment verification.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If manual probe exchange is used, then device complexity is reduced, but measurement precision and exchange accuracy deteriorate
Solution Approach 1:
The patent replaces manual mechanical probe exchange with an automated system that uses a laser alignment unit (optical field) to precisely position and align probes with the probe connector, eliminating the need for complex manual manipulation mechanisms while achieving high alignment precision
Solution Approach 2:
The patent introduces a laser alignment unit as an intermediary between the probe and probe connector. The laser beam serves as a mediator to establish precise alignment without direct mechanical contact, allowing accurate positioning while simplifying the overall exchange mechanism
2Productivity
If automated probe exchange is used, then exchange efficiency is improved, but device complexity increases
Solution Approach 1:
The patent extracts the alignment function from the overall probe exchange system and implements it as a separate, dedicated laser alignment unit. This modular approach enables automated efficient exchange while keeping the complexity contained within a specific subsystem rather than distributing it throughout the entire device
Solution Approach 2:
The laser alignment unit operates autonomously to perform alignment without requiring external intervention or complex control mechanisms. The system self-regulates the alignment process by emitting laser beams and detecting reflections, achieving efficient automated exchange with minimal added complexity
3Measurement precision
If laser alignment is used, then alignment precision is improved, but measurement time increases
Solution Approach 1:
The laser alignment unit performs alignment preparation in advance by pre-positioning the probe relative to the probe connector before the actual measurement begins. This preliminary alignment action ensures high precision positioning is achieved quickly, as the probe is already correctly positioned when measurement starts
Solution Approach 2:
The laser alignment process operates continuously and rapidly without interruption, emitting laser beams and detecting reflections in a continuous manner. This continuous operation enables fast alignment completion while maintaining high precision, eliminating the need for repeated trial-and-error positioning
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and efficient probe exchange, reducing the risk of measurement errors and improving the handling of complex semiconductor structures by ensuring proper alignment and secure connection of probes.
Implementation Method 1
a laser alignment unit including a light emitter and a light receiver. The light emitter is configured to emit a laser beam to the probe
Implementation Method 2
the light receiver is configured to detect the laser beam reflected by the probe
Data Source
AI summary
An apparatus for exchanging a probe includes a stacker configured to receive a probe and to align the probe, a probe connector connected to the probe, and a laser alignment unit including a light emitter and a light receiver. The light emitter is configured to emit a laser beam to the probe, and the light receiver is configured to detect the laser beam reflected by the probe. The laser alignment unit is configured to detect when the probe is properly aligned on the probe connector using the light receiver, and the laser alignment unit is configured to stop moving the stacker when it is detected that the probe is properly aligned.