Laser Alignment Device for Semiconductor Tool and OHT Rail
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Solution Overview
Problem
Existing overhead hoist transport systems in semiconductor fabrication facilities face challenges with misalignment during installation, leading to increased installation time and reduced production yield due to manual repositioning of semiconductor tools and OHT systems.
Innovation Solution
A positioning device using laser lines on the floor and ceiling to align the OHT system's rail with the semiconductor tool's load port, assisted by light detectors for accurate alignment, ensuring precise positioning and reducing manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manual repositioning is used to correct misalignment between OHT system and semiconductor tool, then alignment accuracy can be improved, but installation time increases
Solution Approach 1:
The patent applies preliminary action by providing preliminary alignment marks on the floor and ceiling before installation, and using a positioning device to establish reference positions in advance. This allows installers to quickly achieve accurate alignment without time-consuming manual repositioning, thus improving alignment accuracy while reducing installation time.
2Manufacturing precision
If manual repositioning is performed to correct misalignment, then alignment precision can be improved, but device complexity increases due to additional adjustment mechanisms
Solution Approach 1:
The patent replaces complex mechanical adjustment mechanisms with an optical positioning system. The positioning device uses optical beams and alignment marks to establish precise reference positions, eliminating the need for complex mechanical adjustment mechanisms while achieving high alignment precision.
3Device complexity
If no positioning aid is used during installation, then device complexity is reduced, but alignment time and manual intervention increase
Solution Approach 1:
The patent introduces alignment marks on the floor and ceiling as intermediary elements that facilitate the positioning process. These marks serve as visual guides and reference points, enabling installers to achieve accurate alignment more quickly without requiring complex positioning systems.
4Productivity
If precise alignment is achieved through manual adjustment, then production yield can be improved, but installation costs increase
Solution Approach 1:
The patent enables self-service alignment by providing alignment marks and a positioning device that guide installers through the alignment process without requiring expensive specialized equipment or extensive training. This reduces installation costs while achieving the precise alignment necessary for high production yield.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces installation time and costs while improving production yield by ensuring accurate alignment of OHT systems and semiconductor tools, enhancing the efficiency of the alignment process.
Implementation Method 1
The positioning device includes a laser source and an optical assembly. The optical assembly is configured to direct a laser beam projected from the laser source
Implementation Method 2
The light detector is configured to be installed on the other of the semiconductor tool and the overhead hoist transport system for detecting the first laser line or the second laser line
Data Source
AI summary
Positioning devices and positioning methods are provided. The positioning device includes a laser source and an optical assembly. The optical assembly is configured to direct a laser beam projected from the laser source toward a floor and a ceiling of a semiconductor fabrication facility to generate a first laser line on the floor and a second laser line on the ceiling. The first laser line and the second laser line are parallel to and aligned with each other when viewed in a direction perpendicular to the floor and the ceiling. Accordingly, the first laser line and the second laser line can be used to align a semiconductor tool and an overhead hoist transport system in the semiconductor fabrication facility.