Laser Amplifier Integration via Modular Frame and Beam Redirection
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Solution Overview
Problem
In the development of EUV light generation systems for microfabrication at 32 nm or less, existing laser apparatuses face challenges in efficiently adding amplifiers and power supply devices due to their large and heavy nature, requiring complex realignment and reconfiguration, which is cumbersome and time-consuming.
Innovation Solution
The proposed solution involves a laser apparatus design with a frame-based positioning mechanism and optical system configuration that allows for the addition of amplifiers and power supply devices without the need to realign existing components, using a system of chambers and optical systems to redirect laser beams and facilitate electrical connections, thereby simplifying the integration process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If amplifiers and power supply devices are added to existing laser apparatus, then the laser beam power and functionality are improved, but the device complexity and realignment requirements increase
Solution Approach 1:
The laser apparatus is divided into separate functional modules (amplifier, power supply device, optical systems, chambers) that can be independently positioned and connected. This segmentation allows each component to be added or modified without requiring comprehensive realignment of the entire system, as each module has defined input and output interfaces.
Solution Approach 2:
The frame structure provides universal positioning capabilities with standardized mounting locations for amplifiers, power supply devices, and optical systems. The positioning mechanism and electrical connection terminals are designed to accommodate multiple component types, reducing the need for custom integration procedures when adding new devices.
2Power
If amplifiers and power supply devices are added to existing laser apparatus, then the laser beam power and functionality are improved, but the realignment time and operational disruption increase
Solution Approach 1:
The frame is pre-configured with positioning mechanisms and electrical connection terminals at standardized locations before components are added. This preliminary preparation ensures that when amplifiers or power supply devices are installed, they automatically align with the optical path and electrical connections are readily available, eliminating time-consuming realignment procedures.
Solution Approach 2:
The frame acts as an intermediary structure that mediates between added components and the existing laser apparatus. It provides standardized mechanical mounting and electrical connection interfaces that simplify integration, allowing new devices to be connected without direct modification or realignment of existing components.
3Adaptability or versatility
If optical systems are configured to redirect laser beams, then the beam direction flexibility is improved, but the device complexity increases
Solution Approach 1:
The optical system is segmented into multiple independent optical components (first optical system, second optical system, third optical system) each responsible for specific beam direction changes. This segmentation allows flexible configuration of beam paths without requiring complex integrated optical designs, as each component can be independently positioned and adjusted.
Solution Approach 2:
The optical systems utilize multi-dimensional beam redirection by changing beam direction in different spatial dimensions (first direction to second direction, second direction to third direction). This dimensional approach provides versatile beam routing capabilities while keeping individual optical components relatively simple, as each handles only one direction change.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the complexity and time required for adding amplifiers and power supply devices, minimizing the need for realignment and enabling more efficient integration into existing EUV light generation systems, thus supporting the demand for finer microfabrication.
Implementation Method 1
a first amplifier configured to allow passage of a pulse laser beam output from an external device in a first direction and amplify the pulse laser beam
Implementation Method 2
a first output optical system configured to cause a pulse laser beam having exited from the first amplifier in a first direction to exit in a second direction that is different from the first direction
Data Source
AI summary
A laser apparatus of the present disclosure may include: a frame; a first amplifier positioned to the frame; a first input optical system positioned to the frame and configured to cause a pulse laser beam generated by an external device to enter the first amplifier; and a first output optical system positioned to the frame and configured to cause a pulse laser beam having exited from the first amplifier in a first direction to exit in a second direction that is different from the first direction.