Laser Annealing Control with Device-Specific Recipe Correction
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Solution Overview
Problem
Existing laser annealing devices face challenges in achieving consistent processing results due to individual differences between devices, even when using the same recipe.
Innovation Solution
A laser annealing device equipped with a correction value setting unit that allows for the setting of different correction values for various control input values of the laser beam, enabling the input of corrected control input values to the laser device for precise control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the same recipe is used across multiple laser annealing devices, then the operation simplicity is maintained, but the manufacturing precision deteriorates due to individual device differences
Solution Approach 1:
The patent applies parameter changes by introducing correction values that modify the original recipe parameters. The correction value setting unit adjusts control input values based on individual device characteristics, transforming the generic recipe parameters into device-specific corrected parameters. This allows the same recipe to be adapted to different devices without requiring complete recipe redesign, thus maintaining ease of operation while improving manufacturing precision.
Solution Approach 2:
The patent implements local quality by applying device-specific correction values to each laser annealing device individually. Instead of creating entirely separate recipes for each device, the system maintains a universal recipe structure but applies localized corrections tailored to each device's characteristics. This approach preserves the overall recipe framework (maintaining ease of operation) while introducing device-specific adjustments (improving manufacturing precision).
2Manufacturing precision
If correction values are set for each control input value, then the manufacturing precision is improved, but the device complexity increases
Solution Approach 1:
The patent applies self-service by enabling the correction value setting unit to automatically determine and apply appropriate correction values based on the device's own characteristics and the designated control input values. The system performs self-correction without requiring external manual adjustment for each parameter, thus improving manufacturing precision while limiting the increase in device complexity through automated self-adjustment mechanisms.
Solution Approach 2:
The patent implements preliminary action by pre-setting correction values for multiple control input values before actual processing begins. The correction value setting unit prepares a library of correction values that can be automatically selected and applied during operation. This preliminary preparation improves manufacturing precision by ensuring corrections are ready in advance, while the structured pre-prepared correction system prevents excessive complexity during runtime operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces the impact of individual differences between laser annealing devices, ensuring consistent processing results by allowing for precise correction of control input values.
Implementation Method 1
a laser device 2 that oscillates a laser pulse LP and a laser annealing device 1 that performs an annealing process by irradiating a semiconductor wafer 3 with the laser pulse LP
Data Source
AI summary
A laser annealing device includes, in a laser control unit that controls a laser beam with which a workpiece is irradiated from a laser device for an annealing process, based on a control parameter, a correction value setting unit capable of setting different correction values for a plurality of control input values of the control parameter, and a control input unit that, in a case where any of the plurality of control input values is designated for controlling the laser beam, inputs a corrected control input value obtained by correcting the control input value using the corresponding correction value into the laser device.