Laser Processing System Aperture Plate Calibration

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Solution Overview

Problem

Conventional laser processing systems and methods have insufficient accuracy for applications requiring precision below 0.01 mm and struggle with moving objects between processing and inspection positions.

Innovation Solution

A laser processing system and method utilizing an object mount with an aperture plate and light guide to calibrate the laser scanner, allowing for high-accuracy positioning and transportation between laser processing and inspection devices, while preventing direct laser intensity damage to detectors through internal reflections within the light guide.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional laser processing systems are used for high-precision applications, then processing speed and general accuracy are maintained, but positioning accuracy below 0.01 mm cannot be achieved

Engineering Contradiction:
Improvepositioning accuracyVSAvoidcoordinate transformation accuracy
Core Design Contradiction:
Manufacturing precisionVSMeasurement precision

Solution Approach 1:

The patent replaces mechanical coordinate measurement methods with optical measurement using a light guide and detector system. The light guide transfers laser beam positions to the detector, enabling precise optical measurement of aperture positions on the object mount, which then serves as reference points for accurate coordinate transformation between object and scanner coordinate systems.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces an intermediary measurement system consisting of apertures mounted on the object mount and a light guide with detector. This intermediary system establishes precise correspondence points between the object coordinate system and scanner coordinate system, enabling accurate coordinate transformation without direct mechanical measurement.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If the object is moved between laser processing position and inspection position, then versatility is improved, but positioning accuracy and alignment precision deteriorate

Engineering Contradiction:
Improvedevice interchangeabilityVSAvoidpositioning accuracy
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent makes the object mount universal by equipping it with apertures that can be used with both the laser scanner and additional devices. The same object mount with fixed apertures serves multiple functions: it holds the object for processing, provides reference points for laser scanner calibration, and enables precise positioning when transferred to inspection or other processing devices.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent performs preliminary calibration by determining the positions of apertures on the object mount relative to the laser scanner before object processing. This preliminary establishment of coordinate correspondence ensures that when the object is later moved to inspection or other devices, the pre-established reference points enable accurate re-positioning without losing alignment precision.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If direct laser light is directed to the detector through the light guide, then measurement sensitivity is improved, but detector damage occurs due to high laser intensity

Engineering Contradiction:
Improvedetection sensitivityVSAvoiddetector damage
Core Design Contradiction:
Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent uses the light guide as an intermediary between the laser beam and detector. The light guide transfers optical energy from the laser beam to the detector while inherently reducing the intensity through its optical path. This intermediary structure enables the detector to receive sufficient light for precise measurement without being exposed to damaging direct laser intensity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the intensity parameter of the laser light by the time it reaches the detector. The light guide modifies the light intensity parameter through its optical properties and path length, transforming the high-intensity direct laser beam into a lower-intensity signal suitable for detector measurement while maintaining measurement precision.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise laser processing and inspection by determining aperture positions relative to the laser scanner, ensuring accurate beam direction and reducing detector damage, thereby improving overall system accuracy and versatility.

Implementation Method 1

laser light emerging from the output port of the light guide is detected in dependence of current scan deflections provided by the laser scanner

Methodology Applied
Scientific EffectInternal reflection: Reflection

Data Source

PatentEP2359977B1Laser processing system, object mount and laser processing method
Publication Date: 2015.11.25 CARL ZEISS MICROSCOPY GMBH
  • EP2359977B1 patent drawingFigure 1
  • EP2359977B1 patent drawingFigure 2~3
  • EP2359977B1 patent drawingFigure 4

AI summary

A processing system comprises a common base 53, an object mount 101 configured to hold an object for inspection or processing, at least one aperture plate provided on the object mount, wherein the aperture plate has at least one aperture, a laser device 15 mounted on the common base and configured to scan a laser beam 17 across a scan region 13, a transport device 103 configured to displace the object mount relative to the common base from a first position to a second position, wherein, when the object mount is in the first position, the object and the at least one aperture are positioned within the scan region of the laser device; at least one light guide provided on the object mount, wherein the light guide has an input port provided by the at least one aperture, and an output port; and at least one light detector 151 mounted at a fixed position relative to the common base and configured to detect light emerging from the output port of the light guide.