Laser Array Flatness Measurement for Glass Substrates
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Solution Overview
Problem
Glass substrates used in display devices often have low flatness, leading to uneven layer thicknesses and process errors, necessitating an accurate method and apparatus for measuring flatness.
Innovation Solution
A method and apparatus using a laser source, etalon interferometer, and analyzer to convert a laser into a laser array, measure reflectivities and stresses, and compare them with a reference to determine actual stresses and thicknesses, thereby accurately measuring the flatness of glass substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional measurement methods are used, then the measurement process is simple, but the measurement precision of flatness is insufficient
Solution Approach 1:
The patent divides a single laser beam into multiple laser beams using a beam splitter, creating a laser beam array that can measure multiple points simultaneously. This segmentation approach enhances measurement precision by capturing flatness data across multiple locations while managing device complexity through systematic beam division
Solution Approach 2:
The patent transitions from single-point measurement to multi-point measurement by introducing spatial distribution of laser beams. The laser beam array measures flatness across different positions and depths, adding dimensional coverage to the measurement process, which improves overall measurement precision without proportionally increasing complexity
2Manufacturing precision
If a single laser beam is used, then the device complexity is low, but the measurement of thickness and stress at multiple positions is insufficient
Solution Approach 1:
The patent segments a single laser beam into multiple beams using a beam splitter, enabling simultaneous measurement of thickness and stress at multiple positions. This segmentation allows the system to capture comprehensive manufacturing data across the glass substrate while maintaining manageable system complexity through structured beam management
Solution Approach 2:
The laser beam array serves multiple measurement functions simultaneously - measuring flatness, thickness, and stress at various positions. This multi-functionality improves manufacturing precision by providing comprehensive data from a single measurement system, reducing the need for separate measurement devices
3Measurement precision
If multiple measurement points are not used, then the device complexity is low, but the accuracy of flatness measurement across the entire surface is insufficient
Solution Approach 1:
The patent divides the measurement task across multiple laser beams that illuminate different areas of the glass substrate simultaneously. This segmentation enables comprehensive surface flatness measurement by capturing data from multiple positions, improving overall measurement accuracy while managing apparatus complexity through systematic beam arrangement
Solution Approach 2:
The patent creates multiple copies of the laser beam to cover different measurement positions simultaneously. These beam copies provide redundant and complementary measurement data across the substrate surface, enhancing flatness measurement accuracy without requiring a proportionally complex measurement system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for precise measurement of flatness and thickness deviations, reducing process errors in display devices by correcting the glass substrate flatness.
Implementation Method 1
an etalon interferometer to convert the laser into a laser array irradiated to the object
Implementation Method 2
measuring the flatness of the object using a reflected laser array reflected from the object
Data Source
AI summary
In a method of measuring a flatness of an object, a laser, which may have a wavelength reflectable from the object, may be converted into a laser array. The laser array may be irradiated to the object. The flatness of the object may be measured using a reflected laser array reflected from the object. Thus, the flatness of the object may be accurately measured to decrease process errors of a display device by correcting the flatness of the glass substrate.