Laser Beam Alignment Using Integrated Light Reception Measurement

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Solution Overview

Problem

Existing processing systems for objects using laser light lack efficiency and convenience in positioning and measurement, leading to suboptimal processing results.

Innovation Solution

A processing system and method that includes an irradiation optical system, object placing apparatus, light receiving apparatus, measurement apparatus, movement apparatus, and control apparatus to precisely control the positioning and measurement of the object for accurate laser processing, utilizing first and second information to align the light receiving and measurement apparatuses with the object.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the light receiving apparatus and measurement apparatus are positioned independently, then each apparatus can perform its function, but the positioning accuracy and alignment between apparatuses deteriorates

Engineering Contradiction:
Improvepositioning accuracyVSAvoidsystem complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines the light receiving apparatus and measurement apparatus into a single integrated apparatus. The light receiving unit detects the energy beam position while the measurement unit measures the position of the apparatus itself, both functions are performed by one unified device rather than separate independent apparatuses, improving positioning accuracy through coordinated operation

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated apparatus performs multiple functions: it serves as both a light receiving device for detecting energy beam position and a measurement device for determining its own position. This multi-functional design eliminates the need for separate apparatuses while maintaining or improving overall system precision

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If multiple apparatuses are used for light receiving and measurement, then functional capabilities are enhanced, but the time required for positioning and alignment increases

Engineering Contradiction:
Improveprocessing qualityVSAvoidpositioning time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The integrated apparatus enables continuous coordinated operation where light receiving and measurement functions work simultaneously rather than sequentially. The apparatus can continuously track the energy beam position while simultaneously determining its own position, eliminating the time loss associated with switching between separate apparatuses

Inventive Principle:
Principle #20Continuity of useful action

3Ease of operation

If the object placing apparatus moves to different positions for light receiving and measurement, then both functions can be performed, but the positioning consistency deteriorates

Engineering Contradiction:
Improveoperational flexibilityVSAvoidpositioning consistency
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The integrated apparatus uses feedback from its own position measurement to adjust and maintain accurate positioning. The measurement unit provides real-time position information that is used to control the apparatus movement, ensuring that the apparatus returns to or maintains the correct position for both light receiving and measurement functions, thereby maintaining positioning consistency

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances the precision and efficiency of laser processing by ensuring accurate alignment and measurement, thereby improving the quality and consistency of object processing.

Implementation Method 1

a light receiving apparatus that is disposed at the object placing apparatus and that optically receives the energy beam from the irradiation optical system

Methodology Applied
Scientific EffectOptical reception: Photoelectric Effect

Implementation Method 2

a measurement apparatus that measures a position of at least one of the light receiving apparatus and a part that is related to the light receiving apparatus

Methodology Applied
Scientific EffectPosition measurement: LIDAR

Implementation Method 3

an irradiation optical system that irradiates an object with an energy beam from a light source

Methodology Applied
Scientific EffectLaser irradiation: Laser

Implementation Method 4

irradiating the object with a laser light

Methodology Applied
Scientific EffectEnergy beam heating: Heating

Data Source

PatentUS12397367B2Processing system and processing method
Publication Date: 2025.08.26 NIKON CORP
  • US12397367B2 patent drawing
  • US12397367B2 patent drawing
  • US12397367B2 patent drawing

AI summary

A processing system has: an irradiation optical system irradiating an object with an energy beam from a light source; an object placing apparatus on which the object is placed; a light receiving apparatus that is disposed at the object placing apparatus and that optically receives the energy beam from the irradiation optical system; and a measurement apparatus that measures at least one of the light receiving apparatus and a part that is related to the light receiving apparatus. The processing system moves the object placing apparatus to a position at which the light receiving apparatus optically receives the energy beam and moves the object placing apparatus to a position at which the measurement apparatus measures a position of the light receiving apparatus.