Laser Beam Combining for Compact High-Energy Annealing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Laser annealing systems for large-sized liquid crystal displays face challenges in increasing energy per pulse while maintaining a compact installation area and ensuring maintenance space, as existing systems require expanded installation areas and suffer from maintenance space shortages due to the need to bundle pulse laser beams.
Innovation Solution
A laser system configuration that includes multiple laser apparatuses emitting pulse laser beams in parallel directions, which are then bundled by a beam delivery device to form a combined laser beam with higher energy, reducing the installation area and maintaining space requirements by adjusting optical path lengths and beam divergences using beam adjusters and a beam combiner system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If multiple laser apparatuses are used to increase energy per pulse, then the energy per pulse is improved, but the installation area and maintenance space are worsened
Solution Approach 1:
The patent employs beam combining technology to merge multiple laser beams in the optical path dimension, allowing multiple laser apparatuses to operate from different spatial positions while delivering combined energy through a unified optical path. This dimensional approach to beam combination enables increased energy per pulse without proportionally increasing the footprint area, as the beams are merged along the optical path rather than requiring separate delivery paths for each laser apparatus.
2Use of energy by moving object
If multiple laser apparatuses are used to increase energy per pulse, then the energy per pulse is improved, but the maintenance space is worsened
Solution Approach 1:
The patent introduces a beam combining system with optical elements (beam combiners, mirrors, and optical paths) that act as intermediaries between the multiple laser apparatuses and the target. This intermediary system allows the laser apparatuses to be positioned and maintained from the side or rear, providing maintenance personnel with access to individual laser units without requiring large open spaces, thereby facilitating easier maintenance while still achieving high combined energy output.
3Use of energy by moving object
If laser beams are bundled to increase energy density, then the energy per pulse is improved, but the device complexity is worsened
Solution Approach 1:
The patent divides the laser system into multiple independent laser apparatuses, each capable of generating individual laser beams. These segmented laser units are then combined through a beam combining system that integrates their outputs. This segmentation approach allows for modular design and independent optimization of each laser unit while achieving high combined energy per pulse, making the overall system more manageable despite the increased number of components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively increases the energy per pulse, allowing for efficient irradiation of larger areas at predetermined energy densities, enhancing the manufacturing of large-sized liquid crystal displays while maintaining a compact installation and secure maintenance space.
Implementation Method 1
The beam delivery device may be configured to bundle the first and second laser beams and to emit the first and second laser beams from the beam delivery device to a beam delivery direction different from the first direction
Data Source
AI summary
The laser system may include first and second laser apparatuses and a beam delivery device. The first laser apparatus may be provided so as to emit a first laser beam to the beam delivery device in a first direction. The second laser apparatus may be provided so as to emit a second laser beam to the beam delivery device in a direction substantially parallel to the first direction. The beam delivery device may be configured to bundle the first and second laser beams and to emit the first and second laser beams from the beam delivery device to a beam delivery direction different from the first direction.