Laser Beam Correction Optics for Circular Fine Processing
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Solution Overview
Problem
Existing optical devices suffer from rotationally asymmetric optical characteristics due to manufacturing inaccuracies and holding methods of optical members, leading to non-ideal beam shapes at focus and defocus positions, hindering high-quality fine processing.
Innovation Solution
A processing apparatus with a correction mechanism using at least two optical elements with rotationally asymmetric power, allowing them to rotate about their axes, adjusting the amount and direction of astigmatism through a rotation angle difference and common rotation angle to correct image plane and numerical aperture differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If manufacturing accuracy of optical members is tightened to eliminate rotationally asymmetric optical characteristics, then processing beam quality is improved, but manufacturing cost and complexity increase significantly
Solution Approach 1:
The invention introduces a correction mechanism with cylindrical lenses as an intermediary component between the optical system and the target object. This correction mechanism compensates for rotationally asymmetric optical characteristics generated by imperfect optical members, avoiding the need to tighten manufacturing accuracy of all optical components while still achieving ideal circular beam shape at focus and defocus positions.
2Manufacturing precision
If correction using cylindrical lenses is applied to correct rotationally asymmetric optical characteristics, then beam shape at focus position is improved, but the orientation of correction cannot be determined without additional mechanisms
Solution Approach 1:
The invention makes the correction mechanism rotatable about the optical axis, transforming it from a static component to a dynamic one. This rotational capability allows the orientation of the cylindrical lenses to be adjusted to match the orientation of rotationally asymmetric optical characteristics, enabling comprehensive correction in any angular direction. The rotation angle can be controlled to optimize the correction effect for different beam shapes at focus and defocus positions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus achieves high-quality fine processing by ensuring an ideal circular beam shape at focus and defocus positions, enhancing processing accuracy and quality.
Implementation Method 1
a correction mechanism that corrects rotationally asymmetric optical characteristics of the optical device, the correction mechanism includes at least two optical elements with rotationally asymmetric power
Data Source
AI summary
In order to make a processing beam close to a circular shape, in a processing apparatus including an optical device that guides a laser beam emitted from a light source to a target object and processing the target object with light emitted from the optical device, the optical device includes a correction mechanism that corrects rotationally asymmetric optical characteristics of the optical device, the correction mechanism includes at least two optical elements with rotationally asymmetric power, and a mechanism that enables the at least two optical elements to rotate about their respective optical axes, the amount of rotationally asymmetric optical characteristics changes due to a rotation angle difference between the at least two optical elements, and a direction of the rotationally asymmetric optical characteristics changes depending on a common rotation angle of the at least two optical elements.