Laser Beam Conversion for Uniform Display Layer Crystallization
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Solution Overview
Problem
Existing display apparatus manufacturing methods face challenges in achieving uniform crystallization of semiconductor layers due to irregular laser dispersion, leading to issues like stripe formation and visibility problems on the substrate.
Innovation Solution
A display apparatus manufacturing apparatus and method that convert a laser with initial short-axis dispersion greater than long-axis dispersion into one with reversed dispersion characteristics, using a combination of angle and size converters, including dove prisms and lenses, to ensure uniform energy distribution and improved substrate crystallization.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a laser with short-axis dispersion greater than long-axis dispersion is used for crystallization, then the laser can be emitted with initial dispersion characteristics, but the crystallization uniformity deteriorates due to irregular energy distribution
Solution Approach 1:
The patent applies an angle converter (dove prism) to rotate the laser beam's cross-section by 90 degrees, inverting the dispersion characteristics. The short-axis dispersion is converted to long-axis dispersion and vice versa, transforming the laser from having short-axis greater dispersion to long-axis greater dispersion, thereby achieving uniform crystallization
Solution Approach 2:
The patent uses asymmetric lens combinations (concave and convex lenses with different focal lengths) to differentially adjust the beam width in the long-axis and short-axis directions. This asymmetric optical system transforms the symmetric Gaussian beam into an asymmetric beam profile suitable for uniform crystallization
2Device complexity
If the laser dispersion characteristics are not converted, then the laser emission process is simple, but stripe formation occurs due to non-uniform energy distribution
Solution Approach 1:
The patent introduces an intermediary optical system consisting of angle converters and size converters between the laser source and the substrate. These intermediaries transform the laser beam's dispersion characteristics to eliminate stripe formation caused by non-uniform energy distribution
Solution Approach 2:
The patent changes the physical parameters of the laser beam by adjusting the beam width in long-axis and short-axis directions using lens combinations. This parameter transformation converts the harmful non-uniform dispersion into beneficial uniform dispersion for stripe-free crystallization
3Device complexity
If the laser beam width is not adjusted in different directions, then the optical system is simpler, but grain alignment and crystallization quality deteriorate
Solution Approach 1:
The patent segments the optical adjustment into independent long-axis and short-axis control systems. Separate lens combinations adjust the beam width in each direction independently, allowing precise control of the elliptical beam profile to achieve optimal grain alignment and crystallization quality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces stripe formation and enhances visibility by ensuring uniform crystallization and grain alignment on the substrate, improving the quality of the display apparatus.
Implementation Method 1
the angle converter may include a dove prism
Implementation Method 2
a first concave lens for dispersing the laser in the short-axis direction
Implementation Method 3
a second convex lens for focusing the laser in the long-axis direction
Data Source
AI summary
A display apparatus manufacturing apparatus includes: a laser emitter for emitting a laser having dispersion in a short-axis direction greater than dispersion in a long-axis direction, and a laser converter for converting the laser into a converted laser having dispersion in the long-axis direction greater than dispersion in the short-axis direction.